Micro-Hole Gas Sensor Valves for Stable Outdoor Measurement

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Solution Overview

Problem

Gas sensors struggle to reliably measure gas concentrations in outdoor environments where sudden changes in weather or environmental conditions, such as wind or fine dust, occur, reducing their performance and stability.

Innovation Solution

A gas sensor design featuring a multi-layered thin film with micro holes, detection and heating electrodes, a substrate with a micro chamber, and temperature-reactive valve structures that adjust their volume based on temperature changes, allowing the sensor to stabilize gas detection even in changing conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If gas sensors are used in outdoor environments, then they can detect gas concentrations in real-world conditions, but their reliability reduces due to sudden environmental changes such as wind or fine dust attachment

Engineering Contradiction:
Improveenvironmental adaptabilityVSAvoidmeasurement reliability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent implements dynamic control of micro-hole openings using temperature-reactive valve structures that automatically adjust their state based on environmental temperature changes. This dynamic mechanism allows the sensor to adapt to outdoor conditions while maintaining measurement reliability by closing valves during unstable conditions and opening them during stable conditions.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the physical state of the valve structures by utilizing temperature-dependent volume changes of temperature-reactive polymers. This parameter change enables the valves to transition between open and closed states in response to temperature fluctuations, thereby maintaining sensor reliability across varying environmental conditions.

Inventive Principle:
Principle #35Parameter changes

2Duration of action of stationary object

If the sensor operates continuously in changing environments, then it can provide continuous monitoring, but measurement stability deteriorates due to environmental fluctuations

Engineering Contradiction:
Improvecontinuous operation capabilityVSAvoidmeasurement stability
Core Design Contradiction:
Duration of action of stationary objectVSStability of the object's composition

Solution Approach 1:

The patent implements periodic operation by alternately opening and closing the micro-holes based on environmental stability. The sensor performs measurements during stable periods when valves are open, and closes valves during unstable periods, creating a periodic measurement cycle that maintains stability while enabling continuous monitoring capability.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent applies preliminary action by predicting environmental instability and closing the valves before actual interference occurs. The temperature-reactive valves respond proactively to temperature changes that precede environmental disturbances, preventing dust attachment and wind interference before they can affect measurements.

Inventive Principle:
Principle #10Preliminary action

3Measurement precision

If micro holes are opened for gas detection, then gas molecules can reach the detection electrodes, but environmental interference such as dust attachment increases

Engineering Contradiction:
Improvegas detection precisionVSAvoiddust attachment
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent introduces temperature-reactive valve structures as intermediary elements between the external environment and the detection electrodes. These valves act as selective gatekeepers that allow gas molecules to pass through when open while blocking dust particles and other harmful factors when closed, thereby protecting the detection system while enabling gas detection.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent applies local quality by creating different functional zones: the micro-holes serve as localized access points for gas molecules when open, while the valve structures provide localized protection against dust when closed. This spatial differentiation allows the system to selectively permit gas access while blocking harmful particles at specific locations.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The sensor maintains stable gas concentration measurement and improved reliability in dynamic outdoor environments by blocking and opening micro holes with temperature-responsive valve structures, ensuring consistent operation despite environmental fluctuations.

Implementation Method 1

a plurality of valve structures formed on the multi-layered thin film and in which a volume of each of the plurality of valve structures changes according to a temperature

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Implementation Method 2

a plurality of heating electrodes formed on the multi-layered thin film

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS20260063582A1Gas sensor and method of manufacturing the same
Publication Date: 2026.03.05 ELECTRONICS & TELECOMM RES INST
  • US20260063582A1 patent drawing
  • US20260063582A1 patent drawing
  • US20260063582A1 patent drawing

AI summary

A gas sensor and a method of manufacturing the same are disclosed. A gas sensor according to an embodiment of the present invention includes a multi-layered thin film in which a plurality of micro holes are formed and which includes a plurality of detection electrodes and a plurality of heating electrodes, a substrate which is formed under the multi-layered thin film and of which a portion of a central region is etched to form a micro chamber, and a plurality of valve structures formed on the multi-layered thin film and in which a volume of each of the plurality of valve structures changes according to a temperature.