Gas Showerhead With Integrated Cooling Plate For Uniform Reactant Distribution
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Solution Overview
Problem
Existing gas showerheads for reaction chambers in semiconductor and solar cell manufacturing have complex designs, leading to non-uniform gas distribution, leakage issues, and increased manufacturing costs, with reactant gases not being adequately isolated before entering the chamber.
Innovation Solution
A gas showerhead design featuring a detachable gas distribution and diffusion plate with alternating columns of first and second reactant gas diffusion passages, integrated with a water cooling plate to ensure uniform gas distribution and isolation, preventing leakage and facilitating easy maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple layer plates and complicated tubing structure are used to isolate reactant gases, then gas isolation is achieved, but device complexity increases
Solution Approach 1:
The showerhead is divided into multiple independent gas distribution channels within a single plate structure. Each channel is isolated through precise positioning and sealing structures, allowing different reactant gases to be delivered separately without requiring multiple stacked plates. This segmentation approach maintains gas isolation while simplifying the overall structure.
Solution Approach 2:
A sealing structure acts as an intermediary element between adjacent gas channels to prevent gas mixing. The sealing structure includes sealing pieces that extend into the gas channels and sealing rings that create isolation zones, effectively blocking gas flow between channels without requiring complex multi-plate assemblies.
2Reliability
If complex cooling system is designed to prevent temperature rise, then leakage prevention is improved, but device complexity increases
Solution Approach 1:
The cooling system is merged with the gas distribution plate structure itself. Cooling channels are integrated directly into the plate body, allowing cooling liquid to flow through passages formed within the same component that houses the gas distribution channels. This integration provides effective cooling without adding separate cooling plates or complex external cooling systems.
3Ease of manufacture
If single plate structure is used for gas distribution, then manufacturing cost is reduced, but gas isolation becomes difficult
Solution Approach 1:
Sealing pieces made of flexible or elastomeric materials are used to create effective seals between adjacent gas channels in the single plate structure. These sealing pieces can be compressed or deformed to ensure tight sealing, preventing gas leakage between channels while maintaining a simple single-plate construction that is easier and cheaper to manufacture than multi-plate assemblies.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves uniform gas distribution within the reaction chamber, improving the efficiency and quality of processed workpieces while reducing manufacturing costs and preventing reactant gas deposition on the showerhead.
Implementation Method 1
a water cooling plate, located below the gas distribution and diffusion plate, including a plurality of columns of cooling liquid passages
Implementation Method 2
a gas distribution and diffusion plate, including a plurality of columns of first gas diffusion passages connecting to a first reactant gas source and a plurality of columns of second gas diffusion passages connecting to a second reactant gas source
Data Source
AI summary
The present application provides a gas showerhead including a gas distribution and diffusion plate and a water cooling plate, the gas distribution and diffusion plate includes several columns of first gas diffusion passages connecting to a first reactant gas source and several columns of second gas diffusion passages connecting to a second reactant gas source; the water cooling plate having cooling liquid passages is arranged below the gas distribution and diffusion plate, and the water cooling plate is provided with first gas outlet passages provided for the reactant gas in the first gas diffusion passages to flow out and second gas outlet passages provided for the reactant gas in the second gas diffusion passages to flow out, so as to isolatedly feed at least two reactant gases into a reaction chamber.