Gas Solution Supply with Two-Stage Degassing for Bubble-Free Delivery
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Solution Overview
Problem
The generation of bubbles in gas solutions at the point-of-use due to pressure drop, particularly when high-concentration gas solutions are used, poses a challenge in semiconductor and electronic component manufacturing.
Innovation Solution
A gas solution supply apparatus with a gas dissolving unit, first and second gas-liquid separators, and pressure reducers to depressurize and separate gas solutions, preventing bubble formation by generating dissolved gases as bubbles during depressurization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If high-concentration gas solution is supplied to point-of-use, then cleaning effectiveness is improved, but bubbles are generated due to pressure drop
Solution Approach 1:
The patent applies preliminary action by performing gas-liquid separation before the gas solution reaches the point-of-use. The first gas-liquid separator removes bubbles that form during depressurization, and the second gas-liquid separator provides a final separation stage. This preliminary removal of gas bubbles ensures that when the high-concentration gas solution is supplied to the cleaning apparatus, no bubbles are generated that could interfere with the cleaning process.
Solution Approach 2:
The patent segments the gas-liquid separation process into two distinct stages using two separate gas-liquid separators. The first separator handles the initial separation after depressurization, and the second separator provides additional separation before the solution reaches the point-of-use. This segmentation allows each separator to be optimized for its specific function and ensures thorough bubble removal while maintaining high gas solution concentration.
2Object-affected harmful factors
If gas-liquid separation is performed after depressurization, then bubbles are removed, but system complexity increases
Solution Approach 1:
The patent utilizes parameter changes, specifically pressure changes, to control bubble formation and separation. The pressure reducer depressurizes the gas solution, which causes dissolved gas to come out of solution and form bubbles. These bubbles are then easily separated in the gas-liquid separators. By controlling pressure parameters, the system achieves effective bubble removal without requiring complex mechanical separation devices.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents bubble generation at the point-of-use even with high-concentration gas solutions by effectively separating and removing dissolved gases in supersaturation through sequential gas-liquid separation and depressurization processes.
Implementation Method 1
a gas dissolving unit that dissolves a source gas in a source liquid to produce a first gas solution
Implementation Method 2
a first gas-liquid separator that stores the first gas solution produced and produces a second gas solution through gas-liquid separation of the first gas solution
Implementation Method 3
a pressure reducer that depressurizes the second gas solution produced in the first gas-liquid separator
Data Source
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AI summary
There is provided a gas solution supply apparatus capable of preventing bubbles from being generated in use at a point-of-use even if gas solution to be provided to a point-of-use has a high concentration. The gas solution supply apparatus 1 includes: a gas dissolving unit 4 that dissolves a source gas in a source liquid to produce a first gas solution; a first gas-liquid separator 10 that stores the first gas solution produced and produces a second gas solution through gas-liquid separation of the first gas solution; a pressure reducer 17 that depressurizes the second gas solution produced in the first gas-liquid separator 10; and a second gas-liquid separator 12 that stores the depressurized second gas solution and produces a third gas solution through gas-liquid separation of the second gas solution. The third gas solution is supplied to a point-of-use.