Integrated Gas Supply Nozzle Filter for Particle Diffusion Control

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Solution Overview

Problem

Conventional substrate processing apparatuses face challenges in suppressing particle diffusion into the processing chamber and incur increased costs due to filter exchange requirements, particularly when exchanging filters exposed to the atmosphere, which leads to moisture adhesion and particle generation.

Innovation Solution

A substrate processing apparatus with a gas supply part that includes a filter integrated within the gas supply nozzle, preventing direct exposure to the atmosphere during filter exchange and reducing the need for additional heating mechanisms, thereby minimizing the time and cost associated with filter replacement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If a filter is provided to the piping connecting the vaporizer and the processing chamber, then particles generated in the vaporizer and piping are suppressed from diffusing into the processing chamber, but the inside of the vaporizer and piping are exposed to the atmosphere when the filter is exchanged, causing moisture adhesion and particle generation

Engineering Contradiction:

Improveparticle diffusion into processing chamberVSAvoidmoisture adhesion and particle generation during filter exchange

Core Design Contradiction:

Object-affected harmful factorsVSObject-generated harmful factors

Solution Approach 1:

The filter is nested inside the vaporizer body, specifically positioned within the vaporization chamber where vaporized gas is generated. This integration allows the filter to be surrounded by the vaporizer structure, preventing direct exposure to the atmosphere during filter exchange operations while maintaining its particle filtration function.

Inventive Principle:

Principle #7Nested doll (Nesting)

Solution Approach 2:

The vaporizer body acts as an intermediary structure that houses the filter, creating a protective barrier between the filter and the external atmosphere. This intermediary arrangement enables filter replacement without direct atmospheric exposure, eliminating moisture adhesion issues while maintaining particle suppression capability.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Ease of operation

If the filter is exchanged by exposing it to the atmosphere, then filter replacement is simplified, but additional piping members and heating heaters must be installed and removed, increasing exchange time and cost

Engineering Contradiction:

Improvefilter exchange simplicityVSAvoidfilter exchange time

Core Design Contradiction:

Ease of operationVSLoss of time

Solution Approach 1:

By nesting the filter inside the vaporizer body rather than attaching it to external piping, the filter can be exchanged independently without requiring disassembly of additional piping members or heating heaters. This reduces exchange complexity and time while maintaining effective particle suppression.

Inventive Principle:

Principle #7Nested doll (Nesting)

Solution Approach 2:

The filter is merged with the vaporizer body as an integrated component, eliminating the need for separate piping members and heating heaters that would require installation and removal during filter exchange. This consolidation simplifies the exchange process and reduces associated costs.

Inventive Principle:

Principle #5Merging (Combining)

3Ease of operation

If the filter is positioned outside the processing chamber, then filter exchange is easier, but particles can diffuse into the processing chamber more easily

Engineering Contradiction:

Improvefilter accessibilityVSAvoidparticle diffusion into processing chamber

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The filter is nested within the vaporizer body which is positioned such that the filter remains accessible for exchange while being upstream of the processing chamber. This nested arrangement ensures particles are filtered before entering the processing chamber while maintaining operational accessibility.

Inventive Principle:

Principle #7Nested doll (Nesting)

Solution Approach 2:

The vaporizer body serves as an intermediary structure that positions the filter in an optimal location - close enough to the processing chamber to effectively filter particles before they enter, yet positioned such that the filter can be exchanged without compromising particle suppression capability.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The integrated filter design effectively suppresses particle diffusion into the processing chamber, extends filter service life, and reduces the cost and time required for filter exchange, enhancing overall processing efficiency and cost-effectiveness.

Implementation Method 1

a filter disposed in the gas supply nozzle, for removing impurities contained in the processing gas

Methodology Applied

Scientific EffectFiltration: Filter (physical)

Data Source

PatentUS8343277B2Substrate processing apparatus

Publication Date: 2013.01.01 KOKUSAI DENKI KK

AI summary

To inhibit a diffusion of particles into a processing chamber and reduce a cost required for exchanging a gas filter. A substrate processing apparatus comprises: a processing chamber processing substrates; a gas supply part supplying processing gas into the processing chamber; wherein the gas supply part has a gas supply nozzle disposed in the processing chamber; a filter removing impurities contained in the processing gas; and a gas supply port opened in the gas supply nozzle, for supplying into the processing chamber the processing gas from which impurities are removed by the filter.