Raw Material Gas Supply Pressure Control for Stable Film Formation
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Solution Overview
Problem
Existing film forming apparatuses face challenges in stabilizing the internal pressure of raw material gas supply lines during the initial flow rate stabilization step, leading to variations in gas flow rates and reduced productivity.
Innovation Solution
A raw material supply apparatus with an opening degree adjustment mechanism controlled by a pressure sensor, which adjusts the conductance of the raw material exhaust path to stabilize the internal pressure of the supply line before film formation, ensuring consistent gas flow rates by exhausting the raw material gas without external gas introduction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the raw material gas supply is stabilized before film formation, then the gas flow rate consistency is improved, but the time required for initial stabilization increases
Solution Approach 1:
The system performs preliminary stabilization of the raw material gas supply by controlling the opening degree adjustment mechanism before film formation begins. This preliminary action ensures that the gas flow rate is stabilized in advance, so when film formation starts, the flow rate is already consistent and no additional stabilization time is needed during the actual film formation process.
Solution Approach 2:
The system uses a pressure sensor to detect the internal pressure of the raw material supply path and feeds this information back to the controller. The controller adjusts the opening degree of the opening degree adjustment mechanism based on this feedback to maintain stable pressure and flow rate, ensuring consistent gas supply without requiring extended stabilization periods.
2Stability of the object's composition
If the opening degree adjustment mechanism is used to control pressure, then the pressure stability is improved, but the device complexity increases
Solution Approach 1:
The opening degree adjustment mechanism automatically adjusts the opening degree based on pressure sensor feedback without requiring manual intervention or complex external control systems. The system serves itself by using the pressure information to automatically regulate the gas flow, simplifying the overall control architecture while maintaining high pressure stability.
3Measurement precision
If the raw material gas is exhausted through the exhaust path, then the pressure control precision is improved, but the loss of raw material gas increases
Solution Approach 1:
The system changes the parameter of opening degree of the opening degree adjustment mechanism to precisely control the exhaust flow. By adjusting this parameter, the system achieves accurate pressure control while minimizing the amount of raw material gas exhausted, thus reducing material loss while maintaining precise pressure regulation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for rapid stabilization of the gas flow rate at the start of film formation, reducing variations between wafers and improving productivity by maintaining consistent tank pressures throughout the process.
Implementation Method 1
a pressure sensor configured to detect an internal pressure of the raw material supply path
Implementation Method 2
an opening degree adjustment mechanism provided in the raw material exhaust path and configured to control the internal pressure of the raw material supply path based on an adjustment of an opening degree of the opening degree adjustment mechanism
Data Source
AI summary
A raw material supply apparatus includes: a raw material supply path through which a raw material gas is supplied into a processing container; a valve provided in the raw material supply path; a pressure sensor configured to detect an internal pressure of the raw material supply path; a raw material exhaust path connected to the raw material supply path and through which the raw material gas in the raw material supply path is exhausted; an opening degree adjustment mechanism provided in the raw material exhaust path and configured to control the internal pressure of the raw material supply path based on an adjustment of an opening degree of the opening degree adjustment mechanism; and a controller configured to perform the adjustment of the opening degree of the opening degree adjustment mechanism based on a value detected by the pressure sensor.