Gas Supply System Manual Valve Stroke Adjustment
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Solution Overview
Problem
In semiconductor manufacturing equipment using the ALD method, the presence of a manual valve near the chamber leads to variations in gas flow rate due to differences in flow coefficients, affecting the accuracy of gas flow rate control in the entire gas supply system.
Innovation Solution
A gas supply system with a direct diaphragm valve as the manual valve, equipped with a stroke adjusting mechanism that restricts the stem's upward movement when fully opened, minimizing the influence on gas flow rate control by adjusting the valve stroke and Cv value, ensuring consistent flow characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a manual valve is installed in the immediate vicinity of the chamber for maintenance and emergency shutoff, then the ease of operation is improved, but the manufacturing precision of gas flow rate control deteriorates due to variations in flow coefficient
Solution Approach 1:
The patent adjusts the valve stroke parameter of the manual valve to optimize its flow coefficient. By changing the stroke length, the valve's Cv value is modified to minimize its influence on gas flow rate control, thereby resolving the contradiction between ease of operation and manufacturing precision
Solution Approach 2:
The patent introduces a stroke adjusting mechanism that allows the valve stroke to be dynamically adjusted. This enables optimization of the manual valve's flow characteristics while maintaining its operational functionality, balancing ease of operation with flow rate control precision
2Reliability
If a direct diaphragm valve is used as the manual valve for high responsiveness and particle-free characteristics, then the reliability is improved, but the device complexity increases due to the need for stroke adjustment mechanism
Solution Approach 1:
The stroke adjusting mechanism serves multiple functions: it optimizes the flow coefficient, enables fine-tuning of valve characteristics, and maintains the direct diaphragm valve's reliability. This multi-functionality justifies the added complexity by providing comprehensive control capabilities
Data Source
AI summary
A gas supply system is provided with an automatic valve that is provided in a flow passage and adjusts a flow rate of process gas supplied to a chamber by automatic opening and closing, and a manual valve that is provided downstream of the automatic valve in the flow path and in immediate vicinity of the chamber and adjusts the flow rate of the process gas by manual opening and closing. The manual valve is a direct diaphragm valve having a diaphragm that is placed and separated on and from a seat in conjunction with a stem and a disk along with opening and closing, and includes a stroke adjusting mechanism that adjusts a valve stroke.