Automated High-Pressure Gas Tank Replacement System
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Solution Overview
Problem
The conventional high-pressure gas tank replacement method in semiconductor fabrication facilities is labor-intensive, prone to human errors, and poses safety risks due to the need for manual handling and potential gas leaks, leading to worker fatigue and increased risk of accidents.
Innovation Solution
A system for automatically replacing high-pressure gas tanks, featuring a high-pressure gas tank lift, clamp, connection unit, and control unit that securely loads, aligns, and replaces gas tanks, ensuring safe and rapid exchange without manual intervention, using sensors and actuators to manage the process and prevent gas leaks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual replacement method is used, then device complexity is low, but productivity is reduced due to labor-intensive operations
Solution Approach 1:
The system enables automatic self-service replacement of gas tanks through automated detection of gas levels, mechanical lifting mechanisms, and autonomous connection/disconnection of gas lines, eliminating the need for manual worker intervention in the replacement process
Solution Approach 2:
The patent replaces manual mechanical operations with an automated mechanical system comprising electric motors, hydraulic lifts, and automated coupling mechanisms that perform the gas tank replacement tasks previously requiring human labor
2Reliability
If manual handling is used, then ease of operation is high, but reliability is reduced due to human errors and safety risks
Solution Approach 1:
The system incorporates sensors that continuously monitor gas levels in tanks, detect proper positioning during replacement, and provide feedback signals to the control system to ensure safe and correct operation at each stage of the replacement process
Solution Approach 2:
The system performs preliminary actions including pre-positioning the replacement tank, pre-connecting gas lines, and pre-checking safety mechanisms before the actual replacement occurs, ensuring that all conditions are prepared and verified in advance
Data Source
AI summary
Disclosed is system for automatically replacing a high-pressure gas tank, including: a high-pressure gas tank lift installed in a cabinet which is able to be elevated and including a die to load a high-pressure gas tank thereon; a high-pressure gas tank clamp clamping the high-pressure gas tank loaded on the die of the high-pressure gas tank lift to align the position of the high-pressure gas tank; a high-pressure gas tank connection unit removing an end cap from the high-pressure gas tank elevated by the high-pressure gas tank lift to automatically connect a connector holder to a gas injection nozzle and control the flow of gas; and control unit installed in the cabinet to control operation of the high-pressure gas tank connection unit, the high-pressure gas tank lift, and the high-pressure gas tank clamp.