Gas Temperature Measurement via Pressure Rise Rates
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Solution Overview
Problem
In semiconductor device manufacturing, accurately calibrating gas flow rate controllers and calculating processing chamber volumes is hindered by the difficulty in directly measuring gas temperatures in lines, especially when these lines are housed in gas boxes, making it challenging to ensure precise calibration and volume estimation.
Innovation Solution
A method and system that measure gas temperature in a line by dividing it into sections with known inner volumes and measuring pressure rise rates, allowing for temperature calculation without the need for a temperature sensor in the line, using equations based on the inner volumes and pressure rise rates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a temperature sensor is installed in the line to directly measure gas temperature, then measurement precision is improved, but device complexity and ease of manufacture deteriorate due to the need to open the gas box and install additional sensors
Solution Approach 1:
The patent uses pressure as an intermediary parameter to indirectly measure gas temperature. By measuring pressure changes in a known volume and applying the ideal gas law, the system calculates temperature without requiring direct temperature sensing in the gas line, thus avoiding the need to install sensors inside the sealed gas box
Solution Approach 2:
The patent replaces the direct thermal measurement approach (temperature sensor) with a mechanical measurement approach (pressure sensor). This substitution allows temperature to be inferred through pressure measurements and calculations, eliminating the need for thermal contact with the gas line
2Measurement precision
If the line is opened to install a temperature sensor, then gas temperature measurement precision is improved, but manufacturing precision and reliability deteriorate due to potential contamination and leakage
Solution Approach 1:
The patent uses pressure as an intermediary parameter to indirectly measure gas temperature. By measuring pressure changes in a known volume and applying the ideal gas law, the system calculates temperature without requiring direct temperature sensing in the gas line, thus avoiding the need to install sensors inside the sealed gas box
Solution Approach 2:
The system uses existing components (pressure sensor, known volume chamber) to perform temperature measurement, rather than requiring additional sensors or opening the system. The existing pressure measurement infrastructure serves the dual purpose of pressure control and temperature indication
3Device complexity
If gas temperature is assumed to be equal to room temperature, then device complexity is reduced, but measurement precision deteriorates when actual gas temperature differs from room temperature
Solution Approach 1:
The patent replaces the direct thermal measurement approach (temperature sensor) with a mechanical measurement approach (pressure sensor). This substitution allows temperature to be inferred through pressure measurements and calculations, eliminating the need for thermal contact with the gas line
Solution Approach 2:
The patent changes the measurement parameter from direct temperature measurement to pressure measurement. By measuring pressure and using the ideal gas law relationship, the system derives temperature information from a different physical parameter, avoiding the need for direct thermal sensing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate gas temperature measurement in lines without additional sensors, ensuring precise calibration of gas flow rate controllers and volume calculations of processing chambers, improving the reliability of semiconductor manufacturing processes.
Implementation Method 1
a first pressure rise rate of a gas in the first line is measured in case of introducing a gas at a predetermined flow rate into the first and the second line
Implementation Method 2
a gas temperature in the first line is calculated based on the inner volume of the second line, the first pressure rise rate, and the second pressure rise rate
Data Source
AI summary
There is provided a method of measuring a temperature of a gas in a line connected to a gas supply source and a decompressor, the line being divided by a first, a second and a third valve into a first line between the first valve and the second valve and a second line between the second valve and the third valve. A first pressure rise rate of a gas in the first line is measured when introducing a gas at a predetermined flow rate into the first and the second line. A second pressure rise rate of a gas in the first line is measured when introducing a gas at a predetermined flow rate only into the first line. A gas temperature in the first line is calculated based on known inner volume of the second line, the first pressure rise rate, and the second pressure rise rate.