Gas Delivery Vessel Membrane Separation for Reagent Gas Uniformity
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Solution Overview
Problem
The presence of a stabilizing gas in reagent gas mixtures reduces the utility and value of the reagent gas, leading to reduced concentration and non-uniformity during storage and delivery, which affects the efficiency and quality of processes like chemical vapor deposition and ion implantation, and can result in unpredictable performance and costly downtime.
Innovation Solution
A separation membrane is used to allow preferential flow of the diluent gas relative to the reagent gas, increasing the concentration of the reagent gas by removing the diluent gas from the mixture before delivery.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If stabilizing gas is added to reagent gas for safe storage and transport, then safety is improved, but reagent gas concentration is reduced
Solution Approach 1:
The invention divides the gas delivery system into two separate vessels: one containing pure reagent gas and another containing stabilizing gas. This segmentation allows the reagent gas to be stored in pure form (maintaining high concentration) while still enabling safe delivery by controlling the mixing point, thus resolving the contradiction between safety and concentration.
Solution Approach 2:
The invention extracts the stabilizing gas from the reagent gas storage system, placing it in a separate vessel. This extraction allows the reagent gas to be stored without dilution, maintaining its concentration and utility, while the stabilizing gas is introduced only at the delivery stage to ensure safety during transport and handling.
2Reliability
If stabilizing gas is present in stored gas mixture, then safety is improved, but process efficiency and quality are reduced
Solution Approach 1:
By segmenting the gas storage system into separate vessels for reagent gas and stabilizing gas, the invention enables pure reagent gas to be delivered directly to processing equipment without dilution. This maintains high process efficiency and quality while safety is ensured through controlled introduction of stabilizing gas only when needed during delivery.
3Reliability
If stabilizing gas is present in stored gas mixture, then safety is improved, but gas uniformity is reduced
Solution Approach 1:
The invention segments the gas storage system to maintain pure reagent gas in one vessel and stabilizing gas in another. This prevents composition variations and uniformity issues that arise from storing mixed gases, while still allowing safety to be maintained by controlling the delivery process and introducing stabilizing gas only when necessary.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method produces a concentrated reagent gas with improved uniformity and consistency, enhancing process control and quality in manufacturing processes such as chemical vapor deposition and ion implantation, reducing downtime and costs.
Implementation Method 1
contacting the stored gas mixture with a membrane that allows for preferential flow of one of the gases through the membrane
Implementation Method 2
A separation membrane is used to allow preferential flow of the diluent gas relative to the reagent gas
Data Source
AI summary
Described are methods, systems, and apparatus for processing a gas mixture that contains at least two gases by contacting the gas mixture with a membrane that allows for preferential flow of one of the gases through the membrane, to separate one constituent gas from the mixture.