Oblique-Cut Gate Electrode Layout for Contact Short Prevention
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing integrated circuit designs face challenges in preventing short circuits between gate electrodes and contact electrodes, particularly due to the linear cut shape of gate electrodes without defined end shapes.
Innovation Solution
The integration of gate electrodes with oblique cut surfaces at their ends, along with a contact electrode structure featuring a stem section and branch sections, helps to increase the distance between the gate electrodes and contact electrodes, thereby reducing the likelihood of short circuits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If gate electrodes have a linear cut shape without defined end shapes, then manufacturing is simpler, but short circuits between gate electrodes and contact electrodes occur more frequently
Solution Approach 1:
The gate electrode end surfaces are configured with oblique cuts at different angles rather than uniform linear cuts. Specifically, first end surfaces have a first oblique cut angle and second end surfaces have a second oblique cut angle that differs from the first, creating asymmetric geometry that increases separation distance from contact electrodes and prevents short circuits
Solution Approach 2:
The solution transitions from a two-dimensional linear cut shape to a three-dimensional oblique cut structure. The oblique cuts introduce a dimensional change by creating sloped surfaces that extend in multiple directions, thereby increasing the spatial distance between gate electrode ends and contact electrodes
2Reliability
If gate electrodes have oblique cut surfaces, then short circuit prevention is improved, but manufacturing complexity increases
Solution Approach 1:
Mandrel structures are formed beforehand with the desired oblique cut geometry, and gate electrodes are subsequently formed by filling these pre-configured mandrels. This preliminary action of creating structured mandrels simplifies the overall manufacturing process by transferring the complex geometry creation to a preparatory step
3Reliability
If gate electrodes have oblique cut surfaces, then short circuit prevention is improved, but gate sacrificial material removal becomes more difficult
Solution Approach 1:
Mandrel structures are formed beforehand with the desired oblique cut geometry, and gate electrodes are subsequently formed by filling these pre-configured mandrels. This preliminary action of creating structured mandrels simplifies the overall manufacturing process by transferring the complex geometry creation to a preparatory step
Solution Approach 2:
The gate sacrificial material is completely removed after gate electrode formation. The oblique cut structures facilitate this extraction by creating clear separation paths and reducing material entanglement, allowing for complete removal without compromising the gate electrode structure
Data Source
AI summary
A circuit chip including a substrate, first and second channel active regions on the substrate, and extending in a first direction, the second channel active regions spaced apart from the first channel regions in a second direction intersecting the first direction, first and second gate electrodes intersecting the second channel active regions, third and fourth gate electrodes intersecting the first channel active regions, and a contact electrode between the first, second, third, and fourth gate electrodes. The contact electrode including a stem section in a vertical direction, and first and second branch sections extending from the stem section and contacting a respective source/drain region on the first and second channel active regions, the first gate electrode and the third gate electrode overlapping in the second direction, and including edge portions having widths decreasing as the first gate electrode and the third gate electrode extend toward facing ends thereof.