Gate Resistance Modeling via Segmented Layout Design

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Solution Overview

Problem

Current methods for modeling gate resistance in integrated circuits (ICs) often underestimate values, leading to inaccuracies in design and manufacturing, particularly due to the lack of division of gate width based on gate via locations, which can result in inefficient manufacturing processes and suboptimal IC performance.

Innovation Solution

The method involves dividing the gate width into segments based on gate via locations and applying a distributed resistance model to each segment, using delta resistance networks to calculate effective resistance values, thereby improving accuracy and aligning with design specifications.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If gate width is not divided based on gate via locations, then manufacturing process is simpler, but gate resistance modeling accuracy deteriorates

Engineering Contradiction:
Improvegate resistance modeling accuracyVSAvoidgate width division complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The gate width is divided into multiple segments based on gate via locations. Each segment is then modeled separately using the distributed resistance model, allowing accurate calculation of gate resistance while accounting for the specific layout configuration. This segmentation approach resolves the contradiction by providing precise modeling without requiring overly complex calculations.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different portions of the gate region are assigned different resistance characteristics based on their local properties. The distributed resistance model applies locally to each segment, allowing the gate resistance to be accurately modeled by considering the specific characteristics of each region rather than using a uniform model throughout.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If distributed resistance model is applied to each width segment, then gate resistance accuracy improves, but calculation complexity increases

Engineering Contradiction:
Improvegate resistance accuracyVSAvoidcalculation complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The gate width is divided into segments, and the distributed resistance model is applied to each segment. This segmentation allows the complex calculation to be broken down into manageable parts, improving accuracy while keeping the calculation process systematic and organized.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The resistance model uses parameter changes to accurately represent the distributed resistance characteristics. By adjusting resistance parameters for each segment based on its specific properties, the model achieves high accuracy without requiring overly complex mathematical operations.

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If gate via location is not considered in width segmentation, then layout generation is faster, but manufacturing precision deteriorates

Engineering Contradiction:
Improvelayout compliance with specificationsVSAvoidlayout generation speed
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The gate width is divided into segments and resistance values are calculated in advance during the layout generation process. This preliminary action ensures that the layout complies with manufacturing specifications before fabrication, reducing the need for revisions while maintaining efficient generation speed.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The distributed resistance model provides feedback on whether the layout meets the required specifications. By calculating resistance values for each segment and comparing them against design requirements, the system can quickly identify and correct issues, ensuring manufacturing precision without significant delays.

Inventive Principle:
Principle #23Feedback

Data Source

PatentUS20240386181A1Integrated circuit layout generation method and system
Publication Date: 2024.11.21 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20240386181A1 patent drawing
  • US20240386181A1 patent drawing
  • US20240386181A1 patent drawing

AI summary

A method of generating an IC layout diagram includes receiving the IC layout diagram including an active region, a gate region extending across the active region from a first active region edge to a second active region edge, and a gate via positioned at a location along the gate region between the first and second active region edges, calculating a gate resistance value based on the location and first and second active region edges, based on the resistance value, modifying the IC layout diagram by changing the location of the gate via along the gate region and/or adding another gate via positioned at another location along the gate region, and storing the modified IC layout diagram in a storage device.