Gate Routing Lines Segmentation for Parasitic Loop Oscillation Suppression

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Solution Overview

Problem

In multi-finger transistors, parasitic loop oscillations occur despite the presence of a CR low frequency stabilizing circuit, particularly in millimeter wave regions, leading to instability and oscillation issues.

Innovation Solution

A semiconductor device design featuring multiple gate finger electrodes, gate routing lines, a central resistor separating the gate routing lines, capacitors on either side of the resistor, and air bridges connecting the capacitors to the gate routing lines, which functions as an internal CR low frequency stabilizing circuit to suppress parasitic loop oscillations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a CR low frequency stabilizing circuit is provided outside the transistor, then characteristics in the low frequency band are stabilized, but internal parasitic loop oscillation occurs inside the multi-finger transistor

Engineering Contradiction:
Improvestability of characteristicsVSAvoidinternal parasitic loop oscillation
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The gate routing lines are divided into multiple segments separated by resistors, creating isolated regions that prevent the formation of continuous parasitic loops. The gate routing lines are segmented into first, second, and third regions with resistors positioned between them, breaking the loop paths that would otherwise allow oscillation within the transistor structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Resistors are introduced as intermediary elements between the gate routing line segments. These resistors act as mediators that disrupt the feedback path required for parasitic oscillation while still allowing the gate signal to be distributed to the transistor fingers. The resistors are positioned at specific locations to break the loop without compromising the overall gate drive function.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Speed

If gate routing lines are provided to connect multiple gate finger electrodes, then the transistor can operate at high frequencies, but parasitic loops are formed that cause oscillation

Engineering Contradiction:
Improveoperating frequencyVSAvoidparasitic loop oscillation
Core Design Contradiction:
SpeedVSObject-generated harmful factors

Solution Approach 1:

The gate routing lines are divided into multiple segments separated by resistors, creating isolated regions that prevent the formation of continuous parasitic loops. The gate routing lines are segmented into first, second, and third regions with resistors positioned between them, breaking the loop paths that would otherwise allow oscillation within the transistor structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Resistors are strategically positioned at specific locations along the gate routing lines where parasitic loops are most likely to form. This local modification introduces damping only where needed to suppress oscillation, while maintaining the high-frequency performance of the overall gate routing structure. The resistors are placed between gate finger electrodes to target specific loop paths.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively stabilizes characteristics in the low frequency band and suppresses internal parasitic loop oscillations, even in millimeter wave frequencies, by increasing the stability factor and reducing loop gain.

Implementation Method 1

a CR low frequency stabilizing circuit that is a circuit obtained by connecting capacitance C and resistance R in parallel

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 2

a CR low frequency stabilizing circuit that is a circuit obtained by connecting capacitance C and resistance R in parallel

Methodology Applied
Scientific EffectElectrical Resistance: Electrical Resistance

Implementation Method 3

first air bridges which connect the capacitors to the gate routing lines

Methodology Applied
Scientific EffectElectromagnetic field coupling: Electromagnetic Induction

Data Source

PatentEP3547535B1Semiconductor device
Publication Date: 2022.08.24 MITSUBISHI ELECTRIC CORP
  • EP3547535B1 patent drawingFigure 1
  • EP3547535B1 patent drawingFigure 2A~2B
  • EP3547535B1 patent drawingFigure 3A~3B

AI summary

A plurality of gate finger electrodes (2) is each arranged in a manner alternately adjacent to a corresponding one of drain electrodes (3) and a corresponding one of source electrode (4). The plurality of gate finger electrodes (2) is each connected to a corresponding one of gate routing lines (6). A resistor (7) has one end separating the gate routing lines (6) on respective two sides at a center portion between the gate routing lines (6), and has another end connected to an input line (10). Capacitors (8) are arranged on the respective two sides with respect to the resistor (7) and each connected to the corresponding gate routing line (6) by a corresponding one of air bridges (9).