Gate Valve Bellows Guide Mechanism for Particle Control
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Solution Overview
Problem
The existing gate valve systems in substrate processing systems face challenges in suppressing particle generation due to friction between shafts and abutment plates, which can lead to substrate contamination and reduced yield, while maintaining mechanical strength under high pressure differences.
Innovation Solution
The gate valve incorporates vertically stretchable bellows as guide mechanisms to confine particles generated by friction, combined with a lip seal structure and a height adjusting mechanism, to prevent particle intrusion into the vacuum chamber while maintaining mechanical strength.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a shaft is used to support and move valve bodies under high pressure difference, then mechanical strength is maintained, but particle generation occurs due to friction with abutment plates
Solution Approach 1:
The patent removes the abutment plate that caused friction and particle generation, replacing it with a guide mechanism using bellows and guide members that eliminate the harmful friction contact while maintaining shaft guidance and support functions
Solution Approach 2:
The patent introduces guide members as intermediary components between the shaft and bellows, providing a low-friction guiding surface that prevents direct friction between the shaft and housing while maintaining mechanical support
2Productivity
If multiple valve bodies are arranged vertically in multi-tiers, then substrate conveyance capability is improved, but pressure load on the shaft increases
Solution Approach 1:
The patent divides the support function into multiple guide mechanisms positioned at different vertical locations along the shaft, with each guide mechanism bearing a portion of the pressure load, thereby distributing the total force across multiple support points
Solution Approach 2:
The patent uses expandable bellows as flexible structures to support the shaft and valve bodies, allowing the bellows to expand under pressure while providing guidance and support, thereby managing the pressure load through flexible structural design
3Strength
If guide mechanisms are added to suppress shaft deformation, then mechanical strength is improved, but device complexity increases
Solution Approach 1:
The patent designs the guide mechanism to perform multiple functions simultaneously: the bellows provide both sealing and structural support, while the guide members provide both guidance and load distribution, thereby achieving mechanical strength enhancement without proportionally increasing device complexity
Solution Approach 2:
The patent combines the sealing function and guidance function into a single integrated guide mechanism structure, where the bellows and guide members work together as a unified system to provide both sealing and mechanical guidance, reducing the need for separate components
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses particle generation and maintains mechanical strength by confining particles within the bellows and reducing friction, ensuring reliable operation and increased yield in substrate processing.
Implementation Method 1
vertically expandable bellows provided with a guide member for guiding the supporting member inside the bellows
Data Source
AI summary
Disclosed is a gate valve that opens/closes a plurality of vertically arranged openings by a plurality of valve bodies when conveying a plurality of vertically arranged substrates to an inside of a vacuum container. The gate valve includes: a housing including the plurality of openings formed therein; a supporting member configured to support the plurality of valve bodies; a driving mechanism configured to move the plurality of valve bodies via the supporting member such that the plurality of openings is opened/closed; and a plurality of guide mechanisms arranged to correspond to the plurality of valve bodies, respectively. Each of the plurality of guide mechanisms includes: a vertically stretchable bellows fixed to the housing; and a guide member contained in the bellows and configured to guide the supporting member inside the bellows.