Gate Valve Rod-to-Plate Joint with Three-Point Close Contact
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Solution Overview
Problem
Conventional gate valves in semiconductor processing devices face challenges in achieving a high degree of close contact between the valve plate and valve rod, leading to potential rubbing and heat transfer issues, especially when the seal member deteriorates, requiring frequent replacement and increased effort for maintenance.
Innovation Solution
The gate valve design incorporates multiple inclined surfaces on the connecting fitting and valve rod, forming close-contact mechanism portions that, when pressed together by screws, ensure even and reliable contact over the entire surface area, enhancing the close contact between the valve plate and valve rod, and optionally includes a heater for improved heat transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If valve plate and valve rod are pressed together at two diagonal positions, then wedge effect is achieved, but good heat transfer across entire contact surface is compromised
Solution Approach 1:
Multiple inclined surfaces are created on different faces (front, rear, left, right) of the connecting portion, segmenting the heat transfer path into multiple contact zones. This ensures heat is transferred uniformly across the entire valve plate surface through the valve rod, resolving the contradiction between achieving close contact and maintaining good heat transfer.
2Ease of operation
If conventional connection method is used, then assembly is simple, but rubbing occurs between valve plate and valve rod when not in close contact
Solution Approach 1:
The connection parameters are changed by introducing inclined surfaces that convert axial screwing motion into radial contact pressure. This parameter change ensures the valve plate and valve rod maintain consistent close contact during operation, eliminating rubbing while preserving ease of assembly through the screwing mechanism.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design achieves reliable and consistent close contact between the valve plate and valve rod, reducing particle generation and improving heat transfer, thus enhancing the operational efficiency and reducing maintenance needs by ensuring better alignment and contact without the need for frequent seal replacements.
Implementation Method 1
by bringing these inclined surfaces into contact with each other with pressure, the valve plate and the valve-plate attaching portion are brought into close contact with each other by a wedge effect
Data Source
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AI summary
[Object] To obtain a gate valve with high degree of close contact at a connecting portion between a valve plate and a valve rod. [Solution] A connecting fitting 17 is disposed on an upper face of a valve plate 3 so as to straddle a facing portion between a hole front face 14a of a connection hole 14 and a shaft front face 15a of a connecting shaft 15 and is fixed to the connecting shaft 15 with connecting screws 18. A first close-contact mechanism portion 22 at which a first inclined surface 23 and a second inclined surface 24 are in contact with each other is formed at a portion where the connecting fitting 17 and the connecting shaft 15 are in contact with each other, a second close-contact mechanism portion 25 at which a third inclined surface 26 and a fourth inclined surface 27 are in contact with each other is formed at a portion where the connecting fitting 17 and the valve plate 3 are in contact with each other, and a third close-contact mechanism portion 28 at which a fifth inclined surface 29 and a sixth inclined surface 30 are in contact with each other is formed at a portion where the lower end of the valve plate 3 and the lower end of the connecting shaft 15 are in contact with each other. By bringing the valve plate 3 and the connecting shaft 15 toward each other at three vertical positions with the three close-contact mechanism portions 22, 25, and 28, the hole front face 14a of the connection hole 14 and the shaft front face 15a of the connecting shaft 15 are brought into close contact with each other over the entirety thereof.