Gate Valve Single Drive L-Motion Block Design
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Solution Overview
Problem
Existing gate valves for semiconductor processing and fluid passage control require complex structures and multiple drive apparatuses, leading to increased manufacturing costs and potential interference with internal components and impurities from mechanical abrasion.
Innovation Solution
A gate valve design utilizing a single driving unit with an L-motion block and tensile elasticity unit, allowing vertical and horizontal movement of the valve blade, preventing interference and impurities through a reliable and efficient operation sequence.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If both vertical and horizontal drive apparatuses are used to operate the valve plate, then the valve plate can move accurately to intermediate and closing positions, but the device complexity increases and manufacturing cost rises
Solution Approach 1:
The patent combines both vertical and horizontal driving functions into a single integrated drive apparatus. The L-motion block includes guide grooves that simultaneously provide vertical guidance and horizontal motion conversion, eliminating the need for separate vertical and horizontal drive mechanisms while maintaining accurate positioning capability
Solution Approach 2:
The L-motion block incorporates curved guide grooves that convert vertical linear motion into horizontal motion through geometric curvature. This curved path design enables the valve plate to move horizontally during closing while being driven by a vertically moving actuator, reducing mechanical complexity
2Ease of operation
If both vertical and horizontal drive apparatuses are installed, then complete valve operation is achieved, but the manufacturing cost increases
Solution Approach 1:
The single drive apparatus is designed to perform multiple functions: it provides both vertical positioning for intermediate stops and horizontal motion for closing. The L-motion block's guide groove structure enables one actuator to accomplish what previously required two separate drive systems, reducing manufacturing cost while maintaining full operational capability
Solution Approach 2:
The guide groove is segmented into different sections: a vertical section for upward/downward motion and a horizontal section for closing motion. This segmentation within a single continuous groove allows the valve to perform different operations at different stages of actuator movement
3Volume of moving object
If a slanted operation passageway is used, then the valve rod can be compactly arranged, but interference occurs among components and mechanical abrasion produces impurities
Solution Approach 1:
The patent replaces the slanted straight passageway with a curved guide groove in the L-motion block. This curved path eliminates the interference issues of slanted designs while maintaining compact arrangement. The smooth curvature reduces mechanical abrasion compared to angled transitions, preventing impurity generation in the vacuum chamber
Solution Approach 2:
The L-motion block acts as an intermediary mechanism between the vertically moving actuator and the horizontally moving valve plate. It converts the vertical motion into horizontal motion through its curved guide groove, allowing compact vertical arrangement while achieving clean horizontal valve closing without direct slanted contact
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The single driving unit design simplifies the structure, reduces manufacturing costs, and effectively prevents mechanical abrasion impurities from entering the process chamber, ensuring efficient and accurate opening and closing operations.
Implementation Method 1
a tensile elasticity unit 170, at least more than one of which are installed between the L-motion block 150 and the driving block 160
Implementation Method 2
a guide roller 151 which is inserted and driven into the L-motion block guide groove 142
Data Source
AI summary
The present invention disclosed herein relates to a gate valve, in which only one driving unit is provided, thus obtaining a reliable structure, and although either a closing operation may be performed in such a way that the valve plate is moved from an opening position to an intermediate portion in a vertical direction, and then from its intermediate position to a closing position in a horizontal direction which is vertical with respect to the vertical direction, or an opening operation may be performed in the sequence reverse to the above mentioned sequence.