Gate Valve L-Motion Block for Semiconductor Process Chambers
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing gate valves for semiconductor wafers and liquid crystal substrates require complex and costly constructions with multiple drive apparatuses to prevent interference and impurities, complicating the opening and closing operations.
Innovation Solution
A gate valve design with a single driving unit, utilizing a valve blade, valve rod, L-motion block, cam block, and upward and downward driving unit, which allows the valve plate to move vertically to an intermediate position and then horizontally to the closing position, incorporating an elasticity providing unit and cam block guide to prevent mechanical abrasion and interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple drive apparatuses are used to control the valve plate movement, then the valve operation reliability is improved, but the device complexity and manufacturing cost increase
Solution Approach 1:
The patent combines multiple drive functions into a single integrated drive apparatus. The drive mechanism simultaneously controls both the vertical movement (via the first driving unit and first guide groove) and horizontal movement (via the second driving unit and second guide groove) of the valve plate, eliminating the need for separate drive systems while maintaining operational reliability
Solution Approach 2:
The patent employs dynamic guide grooves with varying slopes that automatically adjust the valve plate's movement trajectory. The first guide groove guides vertical movement during initial operation, while the second guide groove guides horizontal movement during closing operation. This dynamic guidance system replaces complex multi-apparatus control with a single adaptive drive mechanism
2Ease of operation
If the valve plate moves in a slanted direction, then the opening and closing operation is simplified, but mechanical abrasion and impurity generation increase
Solution Approach 1:
The patent divides the valve plate's movement path into two distinct sequential segments: first vertical movement along the first guide groove, then horizontal movement along the second guide groove. This segmentation eliminates slanted movement that causes mechanical abrasion, while maintaining operational simplicity through automated sequential guidance
Solution Approach 2:
The guide grooves act as intermediary elements that mediate between the drive apparatus and the valve plate. The first guide groove mediates vertical movement, and the second guide groove mediates horizontal movement, ensuring the valve plate follows a clean two-stage path that prevents direct slanted contact and reduces mechanical wear
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design simplifies the structure, reduces manufacturing costs, and ensures reliable and efficient operation by preventing interference and impurities, while maintaining precise control over opening and closing sequences.
Implementation Method 1
an elasticity providing unit 175 which is configured to provide elasticity between the L-motion block 150 and the driving rod 170
Data Source
AI summary
A gate valve for a process chamber includes a valve blade for closure of an opening communicating to the process chamber. The valve blade is employed to seal the opening in a valve housing. The valve blade moves first in a vertical direction and then in a horizontal direction normal to the opening when sealing against the opening. The valve blade moves first in the horizontal direction and subsequently in a vertical direction when disengaging from the opening.