Compact Gate Valve Drive Using Nested Crankshafts
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Solution Overview
Problem
Existing gate valve apparatuses in plasma processing systems have a large volume due to their drive mechanisms, which can interfere with the compact design required in semiconductor manufacturing apparatuses.
Innovation Solution
A gate valve apparatus with a reduced volume drive mechanism using first and second crankshafts, a rotation transmission portion, and an actuator to transmit rotation, allowing for compact operation and efficient movement of the valve body.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If a conventional drive mechanism is used to drive the valve body, then the valve body can be opened and closed, but the volume of the drive portion becomes large and interferes with the compact design of the semiconductor manufacturing apparatus
Solution Approach 1:
The patent applies nesting by placing the first crankshaft inside the second crankshaft, with the first output shaft positioned within the second output shaft. This nested arrangement allows both crankshafts to share the same spatial envelope, dramatically reducing the overall volume of the drive portion while maintaining the functionality of driving the valve body through coordinated rotation of both crankshafts.
Solution Approach 2:
The patent merges the functions of two crankshafts by positioning them concentrically, where the first crankshaft and second crankshaft work together to drive the valve body. The rotation transmission portion transmits rotation from the first input shaft to the second input shaft, allowing both crankshafts to operate in coordination within a compact space, combining their driving functions into a unified compact mechanism.
2Volume of moving object
If the drive portion volume is reduced for compact design, then interference with semiconductor manufacturing apparatus is reduced, but the complexity of the drive mechanism increases
Solution Approach 1:
The nested configuration of the first crankshaft within the second crankshaft achieves volume reduction through spatial efficiency. By nesting the components concentrically, the patent reduces the external dimensions of the drive portion while the internal coordination of the two crankshafts manages the mechanical complexity, allowing the system to fit within a compact space without requiring additional external components.
Solution Approach 2:
The patent applies multi-functionality by having the rotation transmission portion serve multiple purposes: it transmits rotation from the first input shaft to the second input shaft, synchronizes the operation of both crankshafts, and enables compact integration of the drive mechanism. This multi-functional component reduces the need for separate control and transmission elements, managing complexity while achieving volume reduction.
3Volume of moving object
If a compact drive mechanism is implemented, then the overall apparatus volume is reduced, but the manufacturing precision required for the crankshafts increases
Solution Approach 1:
The nested crankshaft design achieves compact volume by positioning the first crankshaft within the second crankshaft. This configuration requires high manufacturing precision to ensure proper clearance, alignment, and rotational coordination between the nested components. The concentric arrangement demands precise control of dimensional tolerances to prevent interference while maintaining smooth operation of both crankshafts within the limited space.
Solution Approach 2:
The patent employs asymmetric design in the configuration of the two crankshafts, with the first crankshaft having different dimensional characteristics than the second crankshaft. This asymmetric nesting allows optimization of the spatial arrangement to achieve compact volume while distributing the manufacturing precision requirements across different components, with each crankshaft designed to specific tolerances appropriate to its function and position within the nested structure.
Data Source
AI summary
A gate valve apparatus and a semiconductor manufacturing apparatus, in which a volume of a drive portion for driving a valve body is reduced, are provided. The gate valve apparatus includes a housing having an opening, a valve body configured to open and close the opening, and a drive portion configured to drive the valve body, in which the drive portion includes a first crankshaft including a first input shaft rotatably supported by a side wall of the housing and a first output shaft rotatably supported by the valve body, a second crankshaft including a second input shaft rotatably supported by the side wall of the housing and a second output shaft rotatably supported by the valve body, a rotation transmission portion configured to transmit rotation of the first input shaft to the second input shaft, and an actuator configured to rotate the first input shaft.