Orthogonal-Motion Gate Valve for Durable Parallel Sealing
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Solution Overview
Problem
Existing gate valves in substrate processing systems face challenges in maintaining durable sealing due to unstable pressing direction and force, leading to rubbing and deterioration of sealing materials, especially when the valve body moves obliquely or with uneven sealing surfaces.
Innovation Solution
A gate valve design featuring a base with a first moving mechanism for vertical movement and a second moving mechanism for orthogonal movement, utilizing a differential screw mechanism to accurately control the valve body's contact with a contact surface, ensuring parallel movement and precise pressing force application.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the valve body moves obliquely or with uneven sealing surfaces to achieve sealing, then sealing function is achieved, but rubbing and deterioration of sealing material occurs reducing durability
Solution Approach 1:
The sealing action is divided into two independent sequential movements: first vertical movement to bring the valve body into contact with the sealing surface, then horizontal movement to apply sealing pressure. This segmentation eliminates oblique movement and ensures the sealing surface remains parallel throughout the sealing process, preventing rubbing and deterioration of the sealing material.
Solution Approach 2:
The vertical movement mechanism performs the preliminary action of bringing the valve body into contact with the sealing surface before the horizontal sealing pressure is applied. This preliminary contact ensures proper alignment and parallelism of the sealing surfaces, so that when sealing pressure is applied, no rubbing occurs and sealing durability is improved.
2Device complexity
If a single drive device moves the valve body in one direction for sealing, then device complexity is reduced, but pressing direction and pressing force become unstable
Solution Approach 1:
The sealing function is divided into two independent drive devices: a vertical drive device for contact and a horizontal drive device for sealing pressure application. This segmentation allows each device to perform its specific function with stable and precise control, ensuring stable pressing direction and force while maintaining reasonable system complexity.
Solution Approach 2:
The vertical movement mechanism acts as an intermediary that prepares the valve body for sealing by bringing it into contact with the sealing surface. This intermediary action ensures that the subsequent horizontal sealing pressure is applied stably and uniformly, improving the stability of pressing direction and force.
3Object-affected harmful factors
If the valve body is pressed with insufficient force to achieve sealing, then rubbing is reduced, but sealing performance deteriorates
Solution Approach 1:
The sealing process is segmented into contact phase (vertical movement) and pressure application phase (horizontal movement). During the pressure application phase, sufficient sealing force is applied horizontally after proper contact is established vertically, ensuring both adequate sealing performance and minimal rubbing by maintaining parallel sealing surfaces throughout.
Solution Approach 2:
The vertical contact action is performed as a preliminary step before horizontal sealing pressure is applied. This preliminary action ensures proper alignment and parallelism of sealing surfaces, enabling subsequent application of sufficient sealing force without causing rubbing, thus achieving both good sealing performance and reduced material deterioration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances sealing durability by eliminating rubbing and sticking issues, allowing for stable and reproducible sealing performance while miniaturizing the gate valve system and maintaining accurate control over pressing direction and force.
Implementation Method 1
utilizing a differential screw mechanism to accurately control the valve body's contact with a contact surface
Data Source
AI summary
A gate valve provided in a boundary portion between two sections to block communication between the two sections, the gate valve includes a base, a first moving mechanism installed on the base and configured to move a first movement body along a first linear track, a second moving mechanism installed on the first movement body, and configured to operate at a timing different from the first moving mechanism and to move a second movement body along a second linear track orthogonal to the first linear track, and a valve body installed on the second movement body and configured to come into contact with a contact surface so as to perform sealing. One of the first linear track and the second linear track is parallel to a direction orthogonal to the contact surface.