Gate Valve Pressure Holding for Vacuum Chamber Leak Reduction
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Solution Overview
Problem
Existing gate valves in vacuum processing apparatuses face challenges in efficiently opening and closing chambers while minimizing gas leakage, especially during maintenance of substrate processing and transfer modules, where pressure differences can lead to leaks.
Innovation Solution
A gate valve system utilizing a drive mechanism with multiple gas lines and switching valves to control the movement and positioning of a valve element, allowing for precise control of gas pressure to open, close, and hold the valve element in place, thereby reducing gas leakage between chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a gate valve is used to open and close chambers in vacuum processing apparatuses, then the chambers can be isolated for maintenance, but gas leakage occurs due to pressure differences during maintenance operations
Solution Approach 1:
A third chamber is introduced as an intermediary between the first and second chambers. This intermediate chamber allows pressure equalization through first and second communication openings, enabling the gate valve to maintain sealing while permitting maintenance operations. The third chamber acts as a buffer that mediates the pressure difference problem.
Solution Approach 2:
The original single chamber system is segmented into three separate chambers (first, second, and third chambers). This segmentation allows independent pressure control in each chamber, enabling maintenance of one chamber without affecting the sealing integrity of the gate valve by creating pressure gradients across multiple zones.
2Productivity
If compressed air is supplied to move the valve element, then the valve can be opened and closed efficiently, but additional gas lines and switching valves increase system complexity
Solution Approach 1:
The switching valve serves multiple functions: it controls compressed air supply to the drive mechanism for valve operation, manages pressure equalization between chambers, and coordinates the opening/closing sequences. By making the switching valve multi-functional, the system reduces the need for separate control mechanisms for each function.
Solution Approach 2:
The drive mechanism and pressure equalization system are merged into a single integrated system. The same compressed air supply and switching valve that operate the gate valve also control the pressure equalization process through the communication openings, eliminating the need for separate actuation systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively reduces gas leakage between substrate processing and transfer modules, maintaining a secure seal even during maintenance, by using compressed air to move and hold the valve element in the desired positions, ensuring efficient operation and minimizing pressure differences.
Implementation Method 1
The drive moves the valve element from the opening position to the closing position by pressure of gas supplied from the first gas line or the second gas line
Implementation Method 2
The drive holds the valve element at the closing position by pressure of gas supplied from the second gas line
Data Source
AI summary
A gate valve opens and closes a first opening of a first chamber in a vacuum processing apparatus. The gate valve includes a valve element configured to open and close the first opening; a drive configured to move the valve element so that the valve element takes at least a closing position, where the valve element closes the first opening, and an opening position, where the valve element opens the first opening, a first gas line and a second gas line; and a first switching valve that connects one of the first gas line and the second gas line to the drive. The drive moves the valve element from the opening position to the closing position by pressure of gas supplied from the first gas line or the second gas line, and holds the valve element at the closing position by pressure of gas supplied from the second gas line.