Gate Valve Roller Seal for Adjustable Substrate Transfer
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Solution Overview
Problem
Conventional gate valve devices become complicated and difficult to use when the size of substrates and vacuum processing apparatuses increase, requiring changes in the plate length of the valve plate, which necessitates redesigning elements and complicates the construction.
Innovation Solution
A gate valve device with a valve plate that has a pressure-receiving surface for gas pressure application, a guide part for movement, and a roller-shaped sealing member with a groove for pressurized contact, allowing for adjustable operation without the need for redesigning elements when the plate length changes, and a relief passage to prevent excessive pressure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the plate length of the valve plate is changed to accommodate larger substrates, then the adaptability to different substrate sizes is improved, but the device complexity increases due to redesign requirements
Solution Approach 1:
The valve plate is designed with a standardized configuration that can dynamically adapt to different substrate sizes through adjustable positioning mechanisms rather than redesigning the entire plate structure. The shafts and sealing members are arranged to accommodate variable plate lengths while maintaining the same structural framework.
Solution Approach 2:
The valve plate structure is divided into modular segments including standardized shaft positions, sealing member locations, and support elements that can be selectively configured. This segmentation allows the plate to be adapted to different sizes by adjusting which segments are active rather than redesigning the complete structure.
2Reliability
If multiple shafts are disposed on the valve plate to transmit motive power, then the reliability of valve plate movement is improved, but the device complexity increases
Solution Approach 1:
The shafts are designed to serve multiple functions simultaneously: they transmit motive power from drive means, provide structural support for the valve plate, and serve as mounting positions for sealing members. This multi-functionality reduces the need for separate components and simplifies the overall construction while maintaining reliable movement.
Solution Approach 2:
The functional elements including shafts, sealing members, and support structures are merged into an integrated valve plate assembly where components are combined rather than separate. The shafts are directly mounted on the valve plate and integrate the drive transmission and sealing functions into a unified structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables a simple and adjustable gate valve device that can accommodate changes in plate length without re-designing elements, ensuring effective partitioning of chambers and preventing excessive pressure from entering the communication passage.
Implementation Method 1
a pressure application part which applies gas pressure to the pressure-receiving surface
Implementation Method 2
a lower end part of the valve plate comes into pressurized contact with a surface of a band-shaped base material that is transferred through the communication passage
Data Source
AI summary
A gate valve has a communication block with a communication passage and a valve unit having a valve plate movable between a partitioning position and an open position. A lower end part of the valve plate comes into pressurized contact with a surface of a band-shaped base material transferred through the communication passage between a first chamber and a second chamber. Due to a force of this pressurized contact, a back surface of the base material is seated on a seating surface provided in the communication passage. A groove is formed in the lower end of the valve plate, and a roller-shaped sealing member with a central shaft is inserted into the groove. Opening parts are formed in both axial side-wall surfaces of the groove such that the end parts of the central shaft of the sealing member are inserted into the opening parts and pivotally supported with a clearance.