Gate Valve Seal Maintenance Without Vacuum Break
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Solution Overview
Problem
Existing gate valve apparatuses in vacuum processing systems require opening the associated chamber to the outside air for seal member replacement, leading to contamination, increased evacuation time, and decreased operation rate due to exposure to corrosive gases and moisture.
Innovation Solution
A gate valve apparatus design with a maintenance port and cover allows for seal member replacement without opening the chamber to the outside air, using a single valve body and driving mechanism, maintaining a vacuum state within the transfer chamber and process chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the chamber is opened to the outside air for seal member replacement, then the seal member can be accessed and replaced, but the vacuum environment is contaminated and evacuation time increases
Solution Approach 1:
The gate valve apparatus is segmented into a process chamber side and a transfer chamber side, with the seal member positioned at the interface. The maintenance port allows access to the seal member from the transfer chamber side without opening the process chamber, enabling seal replacement while maintaining the process chamber vacuum.
Solution Approach 2:
The maintenance port serves as an intermediary access path that connects the transfer chamber to the seal member location. This intermediary pathway allows maintenance personnel to reach and replace the seal member without directly opening the process chamber to the outside air, thus preventing contamination.
2Ease of repair
If the chamber is opened to the outside air for seal member replacement, then the seal member can be replaced, but the operation rate decreases due to extended evacuation time
Solution Approach 1:
The gate valve apparatus is segmented into a process chamber side and a transfer chamber side, with the seal member positioned at the interface. The maintenance port allows access to the seal member from the transfer chamber side without opening the process chamber, enabling seal replacement while maintaining the process chamber vacuum.
Solution Approach 2:
The vacuum state in the process chamber is maintained continuously during seal member replacement operations. By accessing the seal member through the maintenance port from the transfer chamber side, the process chamber remains sealed and under vacuum, eliminating the need for evacuation after maintenance and ensuring continuous productive operation.
3Device complexity
If a single valve body is used, then the device complexity is reduced, but the ability to maintain vacuum during seal replacement is compromised
Solution Approach 1:
The single valve body is designed with differentiated local qualities: the process chamber side maintains vacuum sealing integrity, while the transfer chamber side provides maintenance access. The seal member is positioned at the interface between these two regions with different functional requirements, allowing the single valve body to serve both purposes without compromising vacuum reliability.
Data Source
AI summary
A gate valve apparatus of a vacuum processing system includes a surrounding wall that defines a transfer space and has a transfer port. A first valve seat is defined around the transfer port. A valve body is movable within the surrounding wall to open/close the transfer port. A first seal member is disposed on the valve body to engage with the first valve seat. A maintenance port is formed in the surrounding wall to perform maintenance of the first seal member. A second valve seat is defined around the maintenance port. A second seal member is disposed around the first seal member on the valve body to engage with the second valve seat. A maintenance cover is detachably attached outside to close the maintenance port. A driving mechanism drives the valve body within the surrounding wall.