Gate Valve Service Position Extraction Mechanism
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Solution Overview
Problem
Current gate valves in semiconductor manufacturing are difficult to access for maintenance and repair due to their location in tight spaces between process modules, requiring disassembly and removal from the fabrication line, leading to costly and time-consuming service processes.
Innovation Solution
A gate valve design featuring a dual actuator assembly with a service piston and inner piston that allows the gate support to be moved from a closed position to a service position outside the valve housing, enabling quick access for maintenance without disassembly, using a combination of actuators to control the valve's operation and service position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If gate valves are installed in tight spaces between process modules to minimize space usage, then space utilization is improved, but accessibility for maintenance and repair deteriorates
Solution Approach 1:
The gate valve assembly is divided into separable components: the valve body remains installed in the tight space between process modules, while the gate support assembly can be independently extracted through the valve body opening. This segmentation allows the main valve structure to stay in place (maintaining space efficiency) while the serviceable components can be accessed separately (improving maintenance accessibility).
Solution Approach 2:
The gate support assembly is designed to be extractable from the valve housing through the valve body opening. The gate support can be removed from the closed position and extracted through the opening to a service position outside the valve housing, allowing maintenance personnel to access and service the gate support components without disassembling the valve housing or removing the entire valve from its installed position between process modules.
2Ease of operation
If gate valves require disassembly of housing and removal from fabrication line for servicing, then complete access to components is improved, but maintenance time and production downtime worsen
Solution Approach 1:
The gate support assembly can be extracted from the valve housing through the valve body opening without disassembling the housing itself. The gate support is moved from the closed position through the opening to a service position where it can be serviced while the valve remains installed on the fabrication line, eliminating both housing disassembly and valve removal steps.
Solution Approach 2:
The gate support is designed with a service position that allows components to be accessed and serviced without requiring full disassembly. The extraction mechanism and service position are prepared in advance, enabling quick removal and reinstallation of the gate support assembly, significantly reducing maintenance time compared to complete valve removal and disassembly.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design reduces maintenance time from hours to minutes, allowing for efficient servicing of gate valve components without disrupting the fabrication line, thereby minimizing downtime and costs.
Implementation Method 1
a service piston assembly having a service piston reciprocable within the valve housing
Implementation Method 2
an inner piston assembly having an inner piston reciprocable within the service piston assembly
Data Source
AI summary
A gate valve including a valve housing defining a valve chamber having an opening therethrough along a flow path, a gate support supported within the valve housing between a closed position in the flow path, an open position outside of the flow path, and a service position extending out of the valve housing, and a dual actuator assembly having a service piston assembly having a service piston reciprocable within the valve housing, and an inner piston assembly having an inner piston reciprocable within the service piston assembly. The gate support is configured to reciprocate with the inner piston between the closed and open positions, and with the service piston between the closed and the service positions. A method of using the gate valve is also disclosed.