Gate Valve Shake-Prevention Mechanism for Stable Cylinder Synchronization
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Solution Overview
Problem
Existing gate valves in semiconductor-processing apparatuses face issues with synchronization of air cylinders leading to shaking and wear due to gaps between moving members, which destabilize the opening-closing operation of the valve plate.
Innovation Solution
The implementation of a shake prevention mechanism that includes a sliding member and a spring mechanism, with a spacer to transmit spring force, is used to eliminate gaps between moving parts, ensuring stable operation by pressing the sliding member against the sliding surface, thereby preventing shaking.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If thrust bearings are mounted to eliminate gaps between housing bodies and valve opening-closing drive body, then gap elimination is attempted, but it is very difficult to fill gaps with suitable thickness thrust bearings and gaps are likely to be formed due to error
Solution Approach 1:
The invention changes the approach from using rigid thrust bearings with fixed thickness to a flexible sealing structure that can adapt to gap variations. The elastic member (O-ring or V-shaped ring) can deform to fill gaps of varying sizes, eliminating the need for precise thickness matching and reducing manufacturing errors.
Solution Approach 2:
The invention uses composite sealing structures combining rigid components (side frames, center frame) with elastic materials (O-rings or V-shaped rings). This composite approach allows the sealing structure to both support mechanical loads and adapt to gap variations through elastic deformation.
2Reliability
If there is a gap between moving members, then the connection mechanism shakes and contacts air cylinder bodies, but filling the gap is needed to stabilize operation
Solution Approach 1:
The invention applies sealing members locally at the interfaces where gaps cause problems (between side frames and housing, between center frame and side frames). This targeted approach eliminates shaking at critical locations without requiring complex structures throughout the entire mechanism.
Solution Approach 2:
The invention uses elastic sealing members (O-rings or V-shaped rings) that function as flexible elements to fill gaps and prevent shaking. These elastic members can deform to maintain contact and eliminate gaps, providing stable operation without complex rigid structures.
3Manufacturing precision
If thrust bearings are used to eliminate gaps, then contact between members is increased, but the thickness of thrust bearings is not suitable for the gaps and errors cause gap formation
Solution Approach 1:
The invention replaces static rigid thrust bearings with dynamic elastic sealing members that can adapt their shape and position. The elastic members can deform to match varying gap sizes, providing both precision and adaptability that rigid bearings cannot achieve.
Solution Approach 2:
The invention changes from fixed-parameter thrust bearings to variable-parameter elastic sealing members. The elastic members can change their effective thickness and shape through deformation, allowing them to adapt to different gap sizes and maintain precise contact without manufacturing errors.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively eliminates gaps between moving members, stabilizing the opening-closing operation of the valve plate and preventing shaking, ensuring a stable and synchronized motion.
Implementation Method 1
a spring mechanism that presses the sliding member in a direction in which the sliding member comes into contact with the sliding surface
Data Source
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AI summary
A gate valve with a shake prevention mechanism is disclosed. In a connection mechanism (12) that connects a valve shaft (4) to air cylinders (10), shake prevention mechanisms (36A) and (36B) are disposed at facing portions at which outer side surfaces (21a) of side frames (21) face inner side surfaces (13c) of housings (13) of the air cylinders (10) and/or facing portions at which inner side surfaces (21b) of the side frames (21) face left-hand and right-hand side surfaces (22a) of a center frame (22). The shake prevention mechanisms (36A) and (36B) include a sliding member (38) that is disposed on a sliding surface (37) that is formed on one of two surfaces that face each other and on the other and a spring mechanism (39) that presses the sliding member (38) in a direction in which the sliding member (38) comes into contact with the sliding surface (37).