Gated MIS Tunnel Diode Structure for Higher PVCR Control

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Solution Overview

Problem

Conventional negative transconductance devices, such as tunnel diodes and TFETs, have a relatively low peak-to-valley current ratio (PVCR), limiting their usefulness in various applications due to their limited current ratio capabilities.

Innovation Solution

The development of a gated MIS-tunnel diode device with a specific structure and fabrication process, including a tunnel diode dielectric layer and a gate dielectric layer, where the thickness of the tunnel diode dielectric layer is optimized between 2 nm to 4 nm to increase the PVCR by modulating the Schottky barrier height and controlling minority carrier concentration, thereby enhancing the negative transconductance behavior.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional tunnel diode structures are used, then the device structure is simple, but the peak-to-valley current ratio is low

Engineering Contradiction:
Improvepeak-to-valley current ratioVSAvoiddevice structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The device is segmented into distinct functional layers: a gate dielectric layer and a tunnel diode dielectric layer with different thicknesses. The tunnel diode dielectric layer is divided into a first portion (thinner, 2-4 nm) and a second portion (thicker, 4-10 nm), allowing independent optimization of tunneling current and barrier control functions.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the dielectric structure have different thicknesses to perform different functions. The thinner first portion of the tunnel diode dielectric layer enables high tunneling current, while the thicker second portion provides better barrier control, creating local quality variations that improve overall PVCR.

Inventive Principle:
Principle #3Local quality

2Reliability

If the tunnel diode dielectric layer thickness is increased, then the Schottky barrier height control improves, but the tunneling current decreases

Engineering Contradiction:
ImproveSchottky barrier height controlVSAvoidtunneling current
Core Design Contradiction:
ReliabilityVSPower

Solution Approach 1:

The tunnel diode dielectric layer is segmented into two portions with different thicknesses. The first portion (2-4 nm) maintains high tunneling current, while the second portion (4-10 nm) provides improved Schottky barrier control, resolving the trade-off between current and control quality.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The dielectric layer thickness parameter is changed across different portions of the layer, with the first portion having thickness 2-4 nm for high current and the second portion having thickness 4-10 nm for better barrier control, optimizing both competing requirements.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The gated MIS-tunnel diode device achieves a significant increase in peak-to-valley current ratio, from 1 order of magnitude to 6 orders of magnitude, by controlling the tunnel diode dielectric layer thickness, thereby improving the device's performance and utility in applications requiring higher current ratios.

Implementation Method 1

a tunnel diode dielectric layer disposed on the surface of the substrate adjacent to the gate dielectric layer. A tunnel diode electrode is disposed on the tunnel diode dielectric layer... the thickness of the tunnel diode dielectric layer is optimized between 2 nm to 4 nm to increase the PVCR by modulating the Schottky barrier height

Methodology Applied
Scientific EffectQuantum tunneling:

Data Source

PatentUS20240387712A1Gated metal-insulator-semiconductor (MIS) tunnel diode having negative transconductance
Publication Date: 2024.11.21 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20240387712A1 patent drawing
  • US20240387712A1 patent drawing
  • US20240387712A1 patent drawing

AI summary

Gated MIS tunnel diode devices having a controllable negative transconductance behavior are provided. In some embodiments, a device includes a substrate, a tunnel diode dielectric layer on a surface of the substrate, and a gate dielectric layer on the surface of the substrate and adjacent to the tunnel diode dielectric layer. A tunnel diode electrode is disposed on the tunnel diode dielectric layer, and a gate electrode is disposed on the gate dielectric layer. A substrate electrode is disposed on the surface of the substrate, and the tunnel diode electrode is positioned between the gate electrode and the substrate electrode.