GCIB Scanner Belt Drive and Shield Design
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Solution Overview
Problem
Current workpiece scanning mechanisms using gas cluster ion beams (GCIB) face issues such as limited vertical or near-vertical slow-scan movement, contamination due to arm exposure, and potential arm material sputtering, leading to device yield reduction and processing inaccuracies.
Innovation Solution
A scanning apparatus with an elongated member and rotational mechanism for arcuate path scanning, a slow-scan mechanism using a shuttle drive assembly with pulleys and a belt, and shields to deflect the GCIB, reducing arm material sputtering and contamination, while allowing the GCIB to pass through the arm.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the arm is exposed to the GCIB during scanning, then the workpiece can be scanned through the ion beam, but the arm material sputters and causes contamination
Solution Approach 1:
The harmful arm structure is extracted or removed from the ion beam path. The patent uses a shield structure that blocks the arm from direct GCIB exposure, allowing the scanning function to continue while eliminating the source of contamination.
Solution Approach 2:
A shield is introduced as an intermediary element between the GCIB and the arm. This shield absorbs or blocks the ion beam, preventing direct interaction with the arm material while still allowing the workpiece to be scanned through the beam.
2Device complexity
If the shuttle drive assembly uses gravity for downward movement, then the mechanism is simple, but the movement can be jammed and cause processing errors
Solution Approach 1:
The patent introduces a counterweight mechanism to balance the gravitational force on the shuttle. This allows the shuttle to move smoothly in both directions without relying solely on gravity, preventing jams while maintaining mechanical simplicity.
Solution Approach 2:
The patent replaces the gravity-dependent mechanical system with a more reliable actuation mechanism, such as a motorized or spring-loaded system, that can actively control shuttle movement in both directions without jamming.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances scanning flexibility, reduces contamination, and improves device yield by enabling linear movement of the workpiece through the GCIB without exposing the arm to direct ion beam impact, thus minimizing material sputtering and ensuring accurate processing.
Implementation Method 1
a belt mounted over the pulleys and attached to the shuttle
Implementation Method 2
The gas clusters can be ionized by electron bombardment, which permits the gas clusters to be formed into directed beams of controllable energy
Implementation Method 3
The gas clusters can be ionized by electron bombardment
Implementation Method 4
a rotational mechanism mounting the elongated member at a point of rotation and configured to repetitively scan the workpiece through the GCIB along an arcuate path
Data Source
AI summary
Disclosed are an apparatus, system, and method for scanning a substrate or other workpiece through a gas-cluster ion beam (GCIB), or any other type of ion beam. The workpiece scanning apparatus is configured to receive and hold a substrate for irradiation by the GCIB and to scan it through the GCIB in two directions using two movements: a reciprocating fast-scan movement, and a slow-scan movement. The slow-scan movement is actuated using a servo motor and a belt drive system, the belt drive system being configured to reduce the failure rate of the workpiece scanning apparatus. The apparatus further includes shields and other features for reducing process contamination resulting from scattering of the GCIB from the scanning apparatus.