Gear-Driven Container Stopper for Automatic Photoresist Replacement
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Solution Overview
Problem
Current semiconductor manufacturing processes face challenges in efficiently and automatically replacing photoresist (PR) containers during substrate processing, which hinders quick maintenance operations and type recognition, affecting the stability and efficiency of fluid supply.
Innovation Solution
A container stopper system with a first gear and second gear configuration, including a tube coupler and fasteners, allows for automatic recognition and replacement of PR containers, enabling precise and efficient fluid supply and maintenance through a thread-coupling mechanism and rotary coupling structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If manual replacement of PR container is used, then operation flexibility is maintained, but maintenance time increases and automation is reduced
Solution Approach 1:
The system enables automatic replacement of the PR container through self-service mechanisms. The container stopper automatically detaches from the PR container when the fluid level decreases, and the PR container can be automatically supplied and reattached without manual intervention, thus reducing maintenance time and increasing automation.
Solution Approach 2:
The patent replaces manual mechanical operations with an automated detection and replacement system. The container stopper incorporates a detection mechanism that monitors fluid levels and automatically triggers the replacement process, substituting human mechanical actions with an automated electromechanical system.
2Adaptability or versatility
If simple container connection is used, then device complexity is reduced, but type recognition capability is lost
Solution Approach 1:
The container stopper is designed with multi-functionality to handle various PR container types. It incorporates both a simple connection structure for universal compatibility and an integrated detection mechanism that can identify different container types, allowing the same device to perform both basic connection and intelligent recognition functions.
Solution Approach 2:
The patent merges the container connection function with the type recognition function into a single integrated container stopper assembly. The detection structure is combined with the mechanical coupling elements, allowing type recognition and physical connection to occur simultaneously without requiring separate complex systems.
3Productivity
If frequent manual maintenance is performed, then system reliability is maintained, but productivity decreases
Solution Approach 1:
The automatic replacement system ensures continuous fluid supply by detecting when the PR container is depleted and immediately initiating the replacement process. This eliminates interruptions in the manufacturing process, maintaining both high productivity and reliable fluid supply without requiring frequent manual maintenance interventions.
Solution Approach 2:
The container stopper incorporates a feedback mechanism that continuously monitors the fluid level in the PR container. When the fluid level drops below a threshold, the system receives feedback and automatically triggers the replacement process, ensuring reliable fluid supply while maximizing productivity by minimizing downtime.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables automatic and precise replacement of PR containers, reducing maintenance time, ensuring stable fluid supply, and allowing for recognition of various container types, thus improving the efficiency and reliability of semiconductor device manufacturing.
Implementation Method 1
a first gear having a first axis extended in a first direction; a second gear spaced apart from the first axis in a horizontal direction crossing the first direction
Implementation Method 2
the first gear has a female thread structure formed on an inner side surface of the first gear
Implementation Method 3
a first tube fastener, which is placed on and coupled to the coupler body and is connected to the insertion tube
Data Source
AI summary
A container stopper may include a first gear having a first axis extended in a first direction, a second gear spaced apart from the first axis in a horizontal direction crossing the first direction, a tube coupler coupled to the first gear, and an insertion tube extended from the tube coupler in a downward direction. The tube coupler may include a coupler body coupled to the first gear to be rotatable to the first gear and a first tube fastener, which is placed on and coupled to the coupler body and is connected to the insertion tube. The first gear may have a female thread structure formed on an inner side surface of the first gear, and the second gear may have a rotary coupling structure formed on a top or bottom surface of the second gear.