Generic I/O Interface for Heterogeneous Semiconductor Hardware Control

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Solution Overview

Problem

The existing software control systems for semiconductor processing systems are not generic and require significant changes when hardware components are updated or replaced, leading to inefficiencies in managing heterogeneous hardware devices due to different communication protocols.

Innovation Solution

A generic Input/Output (I/O) interface is introduced between a process management module and hardware devices, using generic device objects that abstract actual hardware devices, allowing the process management module to operate independently of hardware changes by translating operations into specific communication protocols for various hardware devices.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If customized software is used to control specific hardware I/O controllers, then control precision for that hardware type is improved, but adaptability to other hardware types deteriorates

Engineering Contradiction:

Improvecontrol precisionVSAvoidadaptability to hardware types

Core Design Contradiction:

Measurement precisionVSAdaptability or versatility

Solution Approach 1:

A generic device object serves as an intermediary layer between the process management module and hardware I/O controllers. This intermediary translates generic control operations into hardware-specific protocol commands, enabling the process management module to control different hardware types without customization. The device interface module acts as another intermediary that handles protocol-specific details.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The process management module is designed with universal control capabilities through generic device objects that can interface with multiple types of hardware I/O controllers. Instead of creating separate software for each hardware type, the system uses a single universal interface that adapts to different hardware protocols through the device interface module.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If hardware is replaced or upgraded, then system modernization is improved, but software compatibility deteriorates

Engineering Contradiction:

Improvehardware upgrade capabilityVSAvoidsoftware compatibility

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The control system is segmented into distinct layers: the process management module, generic device objects, device interface module, and hardware I/O controllers. This segmentation isolates hardware-specific details in the lower layers, allowing hardware replacement without affecting upper layers. The generic device objects remain unchanged while the device interface module adapts to new hardware.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The generic device object and device interface module act as intermediaries that buffer between the process management module and hardware. When hardware is replaced, only the intermediary layers need updating, not the entire process management module, maintaining software compatibility while enabling hardware modernization.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Ease of operation

If hardware-dependent software portions are integrated throughout the software code, then control functionality is improved, but time required to alter control software deteriorates

Engineering Contradiction:

Improvecontrol functionalityVSAvoidsoftware alteration time

Core Design Contradiction:

Ease of operationVSLoss of time

Solution Approach 1:

Hardware-dependent code is extracted from the process management module and placed in separate device interface modules and generic device objects. This extraction allows the process management module to remain independent of hardware changes, significantly reducing the time required to alter control software when hardware is updated.

Inventive Principle:

Principle #2Taking out (Extraction)

Data Source

PatentUS7725205B1Apparatus and methods for providing a homogenous I/O interface for controlling a heterogenous mixture of hardware I/O systems

Publication Date: 2010.05.25 NOVELLUS SYSTEMS INC

AI summary

Disclosed are apparatus and methods for controlling a heterogeneous mixture of hardware devices in a variety of semiconductor process equipment. In general, a generic Input and Output (I/O) interface is provided between a process management module for specifying control operations and the actual hardware devices of a particular process tool. The process management module generally includes high level processes and/or user interfaces for controlling one or more process tool(s) by interacting with a set of generic device objects that are abstractions of actual hardware devices of such tool(s). The I/O interface translates interactions with the generic device objects into interactions with the different hardware devices. The process management module utilizes one or more of these generic device objects to specify operation, in a generic manner, of hardware devices and the I/O interface translates such operations into operations that are specific to the different hardware devices. As a result of this interface that manages and separates the interactions with the generic device objects from interactions with the hardware, both the process management module and the generic device objects can remain unchanged when changes occur to the hardware configuration or to an individual hardware device.