Geometric Imaging Error Compensation in Microscopic Scanning

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Solution Overview

Problem

Geometric imaging errors in microscopic imaging systems, such as laser scanning microscopes, occur due to mechanical, optical, and electronic inaccuracies, leading to deformations and distortions that hinder precise superimposition of image contents from multispot scans.

Innovation Solution

A method involving the creation of a reference image dataset free of geometric errors, comparison with actual image datasets, and compensation for location deviations to correct deformations and distortions, allowing for accurate pixel-to-object point alignment and error-free image generation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If scanning movement is used to illuminate object points sequentially, then imaging speed is improved, but geometric imaging errors occur due to mechanical and optical inaccuracies

Engineering Contradiction:
Improveimaging speedVSAvoidgeometric imaging accuracy
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent applies preliminary action by determining correction values for geometric imaging errors before actual imaging occurs. A reference image data set is created and stored beforehand, containing information about ideal pixel locations. During subsequent imaging operations, these pre-determined correction values are used to compensate for scanning non-linearities and mechanical inaccuracies, allowing fast scanning without sacrificing geometric accuracy.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent implements feedback by comparing actual pixel locations in acquired images against the stored reference image data set. The differences (deviation values) are calculated and used to determine correction values that are then applied to compensate for geometric errors. This closed-loop feedback mechanism continuously corrects for scanning non-linearities and mechanical inaccuracies.

Inventive Principle:
Principle #23Feedback

2Productivity

If bidirectional scanning is used to double scanning speed, then productivity is improved, but lateral pixel offsets occur due to non-linearities in different scanning directions

Engineering Contradiction:
Improvescanning speedVSAvoidpixel position accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The patent creates a comprehensive reference image data set beforehand that captures the ideal geometric relationships for all pixel locations across the entire imaging field. This reference data accounts for potential non-linearities in both scanning directions. When bidirectional scanning is performed at high speed, the pre-established reference allows for accurate correction of lateral pixel offsets without requiring slower scanning.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system continuously compares actual pixel positions against the reference image data set and calculates deviation values for correction. This feedback mechanism specifically addresses lateral offsets caused by bidirectional scanning non-linearities, compensating for direction-dependent errors and maintaining pixel position accuracy even at doubled scanning speeds.

Inventive Principle:
Principle #23Feedback

3Productivity

If multispot scanning is used to increase imaging throughput, then productivity is improved, but geometric errors occur at different positions in each partial image

Engineering Contradiction:
Improveimaging throughputVSAvoidimage alignment accuracy
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent handles multispot scanning by treating each spot's partial image separately. For each spot, individual correction values are determined based on comparisons with the reference image data set. This segmentation approach allows each partial image to be corrected independently for its specific geometric errors, ensuring that when images are later combined, they align accurately without positional mismatches.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies local quality by determining correction values specific to each spot's partial image rather than using a uniform correction across the entire image. Each spot's geometric errors are measured and corrected individually based on its local deviations from the reference. This ensures that geometric accuracy is optimized for each local region, allowing accurate superimposition of multiple partial images.

Inventive Principle:
Principle #3Local quality

4Adaptability or versatility

If objective lens parameters deviate from predefined values, then manufacturing flexibility is improved, but barrel or pincushion distortions occur

Engineering Contradiction:
Improveoptical system flexibilityVSAvoidgeometric distortion
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent uses feedback to detect and correct geometric distortions caused by objective lens parameter variations. The reference image data set provides ideal geometric relationships, and actual images are compared against this reference to determine deviation values. These deviations reveal barrel or pincushion distortions, and correction values are calculated and applied to compensate for the distortions, maintaining geometric accuracy even when lens parameters differ from specifications.

Inventive Principle:
Principle #23Feedback

Data Source

PatentUS10726529B2Method for the determination and compensation of geometric imaging errors
Publication Date: 2020.07.28 CARL ZEISS MICROSCOPY GMBH
  • US10726529B2 patent drawing

AI summary

A method for the determination and compensation of geometric imaging errors which occur during the imaging of an object by sequential single or multispot scanning by means of a microscopic imaging system, which includes: establishing a reference object with a defined plane structure; and generating an electronic image data set of this structure free of geometric imaging errors. Then, generating at least one electronic actual image data set with the imaging system; comparing the actual image data set with the reference image data set with respect to the locations of those pixels which have the same object point as origin in each case; and determining location deviations in the actual image data set compared to the reference image data set.