Tensioned Germanium Membrane With Gradient Traction Arms

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Solution Overview

Problem

Existing methods for manufacturing tensioned germanium membranes often apply excessive or inhomogeneous stresses, limiting the intensity of applicable voltage and inducing weak points that can lead to membrane rupture and harmful behavior in certain applications.

Innovation Solution

A suspended germanium-based membrane with traction arms having non-parallel lateral sides that increase in width away from the active zone, forming an obtuse angle with the active area, which allows for uniform stress distribution and increased deformation without risk of rupture, enabling the production of optical and electronic devices like diodes, transistors, and lasers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Force

If high stress is applied during manufacturing to achieve sufficient membrane tension, then the membrane can be suspended and functional, but the membrane is at risk of rupture and the maximum applicable voltage is limited

Engineering Contradiction:
Improvemembrane tensionVSAvoidmembrane rupture resistance
Core Design Contradiction:
ForceVSStrength

Solution Approach 1:

The traction arms are designed with non-uniform width, being wider at the connection to the active zone and narrower at the distal end. This gradient structure concentrates the stress distribution in specific regions, allowing the membrane to withstand higher tension forces without rupturing. The varying cross-section optimizes the mechanical properties by placing material where it is most needed for stress distribution.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The traction arms feature non-parallel lateral sides that form an obtuse angle with the active area boundary, creating an asymmetric geometry. This asymmetric design allows for optimized stress distribution along the arm length, with the wider base providing greater structural support at the critical connection point while tapering to reduce material usage and stress concentration at the distal end.

Inventive Principle:
Principle #4Asymmetry

2Reliability

If uniform stress distribution is achieved through proper traction arm design, then membrane reliability is improved, but the device complexity increases due to the specific geometric requirements

Engineering Contradiction:
Improvemembrane behavior uniformityVSAvoidtraction arm geometry
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The traction arm geometry is defined by specific parameter relationships: the lateral sides form a predetermined obtuse angle with the active area boundary, and the width varies according to a gradient profile. By establishing these parameter relationships during manufacturing, uniform stress distribution is achieved without requiring complex post-processing or adjustment mechanisms.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The traction arms are pre-formed with the optimal non-uniform width profile and obtuse angle geometry before being integrated into the device. This preliminary shaping ensures that when the membrane is suspended, the stress is automatically distributed uniformly across the active zone, eliminating the need for subsequent stress-adjustment operations.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for higher maximum deformation and uniform stress distribution within the membrane, enabling the production of devices with enhanced optical and electronic properties while preventing rupture, thus overcoming the limitations of existing methods.

Implementation Method 1

They exert stresses that are too high during the manufacturing process of the germanium membrane, which limits the intensity of the voltage accessible to prevent rupture of the membrane

Methodology Applied
Scientific EffectStress distribution:

Implementation Method 2

a suspended germanium membrane put under tension by arms

Methodology Applied
Scientific EffectMechanical tension: Tension

Implementation Method 3

etching of a sacrificial layer under the germanium-based layer to obtain a suspended germanium-based membrane

Methodology Applied
Scientific EffectEtching:

Data Source

PatentEP2960203B1Germanium-based membrane device under stress
Publication Date: 2019.11.06 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • EP2960203B1 patent drawingFigure 1a~1d
  • EP2960203B1 patent drawingFigure 2a~2d
  • EP2960203B1 patent drawingFigure 3a~3d

AI summary

Optical and/or electronic device comprising a suspended germanium-based membrane (20), comprising an active zone (21) tensioned by traction arms (23), characterized in that it comprises at least one traction arm (23) comprising non-parallel lateral sides (32), the width of which increases with distance from the active zone (21).