Germanium Rib Optical Modulator for Low Power Silicon Photonics

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Solution Overview

Problem

Current silicon-based optical modulators face challenges with high energy consumption and large on-chip area due to long phase shifter lengths, while silicon micro-ring resonators are susceptible to fabrication errors and have limited modulation bandwidth.

Innovation Solution

A Germanium rib-based optical modulator is developed, where a semiconductor substrate with Germanium rib is used between two waveguides, and electrodes apply an electrical field to modulate the signal, leveraging the Frank-Keldysh effect for enhanced optical absorption and reduced power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If a silicon-based modulator uses free carrier plasma dispersion effect with long phase shifter length, then modulation function is achieved, but energy consumption increases and on-chip area increases

Engineering Contradiction:
Improveenergy consumptionVSAvoidphase shifter length
Core Design Contradiction:
Use of energy by moving objectVSLength of moving object

Solution Approach 1:

The patent changes the material parameter from silicon to germanium and utilizes the Frank-Keldysh effect instead of free carrier plasma dispersion effect. This parameter change enables achieving the same modulation function with significantly shorter interaction length, thereby reducing both energy consumption and on-chip area.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs a hybrid structure combining silicon waveguides with a germanium rib. This composite material approach leverages the superior electro-optic properties of germanium while maintaining compatibility with silicon photonics platforms, enabling compact and low-power modulation.

Inventive Principle:
Principle #40Composite materials

2Area of stationary object

If a silicon micro-ring resonator modulator is used, then on-chip area is reduced, but fabrication error susceptibility increases and modulation bandwidth is reduced

Engineering Contradiction:
Improveon-chip areaVSAvoidfabrication error susceptibility
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The patent divides the modulation function into two independent parts: the silicon waveguide structure for optical confinement and the germanium rib for electro-optic modulation. This segmentation allows each component to be optimized independently, reducing fabrication error susceptibility while maintaining compact size.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The germanium rib provides localized electro-optic modulation only where needed, rather than requiring the entire micro-ring structure to be sensitive to electrical fields. This local quality approach reduces fabrication sensitivity and maintains higher modulation bandwidth.

Inventive Principle:
Principle #3Local quality

3Reliability

If hybrid integration of III-V semiconductor or lithium niobate modulators onto silicon platform is used, then modulation performance is achieved, but manufacturing cost increases and volume manufacturability is reduced

Engineering Contradiction:
Improvemodulation performanceVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent uses germanium, which is chemically and structurally similar to silicon, enabling homogeneous integration within the silicon photonics ecosystem. This homogeneity allows the use of existing silicon CMOS fabrication processes, significantly reducing manufacturing cost and enabling volume production while maintaining high modulation performance.

Inventive Principle:
Principle #33Homogeneity

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves lower energy consumption, smaller on-chip footprint, and potentially higher modulation speed, with improved compatibility with CMOS processing, enabling efficient encoding of optical signals in silicon photonics circuits.

Implementation Method 1

leveraging the Frank-Keldysh effect for enhanced optical absorption and reduced power consumption

Methodology Applied
Scientific EffectFrank-Keldysh effect: Franz-Keldysh Effect

Implementation Method 2

the first electrode and the second electrode are configured to apply an electrical field to the Germanium rib in order to modulate the input signal propagating through the Germanium rib

Methodology Applied
Scientific EffectElectro-optic modulation: Electro-Optic Effects

Data Source

PatentUS9134553B2Optical modulator and method for manufacturing the same
Publication Date: 2015.09.15 ADVANCED MICRO FOUNDRY PTE LTD
  • US9134553B2 patent drawing
  • US9134553B2 patent drawing
  • US9134553B2 patent drawing

AI summary

An optical modulator and a method for manufacturing an optical modulator are provided. The optical modulator includes a first waveguide, a second waveguide, a modulating portion connected between the first waveguide and the second waveguide, the modulating portion being configured to receive an input signal from the first waveguide, to modulate the input signal and to supply a corresponding modulated input signal as an output signal to the second waveguide, wherein the modulating portion includes a semiconductor substrate, one end thereof being coupled to the first waveguide, and a corresponding opposite end thereof being coupled to the second waveguide, a Germanium rib provided on the substrate such that the input signal propagates through the Germanium rib along a longitudinal axis thereof, and a first electrode and a second electrode respectively provided on the substrate, wherein the Germanium rib is provided between the first electrode and the second electrode, and wherein the first electrode and the second electrode are configured to apply an electrical field to the Germanium rib in order to modulate the input signal propagating through the Germanium rib.