Getter Element Electrical Isolation in Micromechanical Sensors
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing micromechanical rotation rate sensors face challenges in maintaining low cavity pressure over their lifetime, which can lead to uncontrolled interactions between getter elements and movable elements, affecting sensor accuracy and reliability.
Innovation Solution
A micromechanical component design that includes a sensor chip and a cap chip with a getter element, where the getter element is electrically conductively connected to an electrode, allowing for controlled electrical potential application and placement close to the movable element, reducing uncontrolled interactions and maintaining low cavity pressure through sorption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the getter element is placed close to the movable element to maintain low cavity pressure, then the sorption power is improved, but uncontrolled interactions between the getter element and movable element increase
Solution Approach 1:
The patent introduces an insulator level as an intermediary between the getter element and the movable element. This insulator level electrically isolates the getter element from the movable element, preventing uncontrolled electrical interactions while allowing the getter element to maintain its close proximity to the movable element for effective pressure maintenance.
Solution Approach 2:
The patent extracts the electrical conductivity function from the getter element by introducing a separate electrode structure. The getter element is placed on an insulator level, separating its sorption function from electrical conduction, thereby preventing harmful electrical interactions while maintaining its pressure control function.
2Object-affected harmful factors
If the getter element is electrically isolated from the electrode, then uncontrolled interactions are reduced, but the ability to apply defined electrical potential is lost
Solution Approach 1:
The patent introduces an insulator level as an intermediary that provides both electrical isolation and a controlled interface. The getter element is placed on this insulator level, which electrically isolates it from the movable element while still allowing controlled electrical potential application through dedicated electrodes.
Solution Approach 2:
The patent segments the electrical control function from the getter element by introducing separate electrodes (first electrode and second electrode) that can independently control different aspects of the getter element's operation, allowing precise electrical potential management while maintaining electrical isolation where needed.
3Device complexity
If a single-section getter element is used, then the structure is simple, but flexible monitoring of interactions is limited
Solution Approach 1:
The patent divides the getter element into multiple electrically insulated sections (first section and second section), each connected to separate electrodes. This segmentation enables independent electrical control and monitoring of different regions of the getter element, providing flexible monitoring capabilities while maintaining a relatively simple overall structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively maintains low cavity pressure, reduces uncontrolled interactions, and allows for flexible monitoring and control of the movable element, enhancing the accuracy and reliability of the micromechanical sensors.
Implementation Method 1
The getter element in this micromechanical component may advantageously at least partially bind the gas present in the cavity and thereby ensure a low pressure in the cavity
Data Source
AI summary
A micromechanical component includes a sensor chip and a cap chip connected to the sensor chip. A cavity is formed between the sensor chip and the cap chip. The sensor chip has a movable element situated in the cavity. The cap chip has a wiring level containing an electrically conductive electrode. The cap chip has a getter element situated in the cavity.