Getter Pumping System for Linear Accelerators
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Solution Overview
Problem
Existing getter pumping systems for high-volume environments, such as linear accelerators and semiconductor manufacturing, face limitations in pumping speed and capacity, particularly for hydrogen (H2) and residual gases like CO and H2O, with current systems often having restricted configurations and inefficiencies in gas management.
Innovation Solution
A getter pumping system with a high density of getter cartridges (20-2500/m²) and linear heaters (20-5000/m²) mounted on a wall, allowing for flexible configurations and enhanced gas sorption capabilities, including the use of elongated getter elements and modular heater integration, to achieve improved pumping speeds and capacities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a limited number of getter cartridges are used in traditional configurations, then the device complexity is reduced, but the pumping speed and capacity are insufficient for high-volume environments
Solution Approach 1:
The system divides the vacuum pumping function into multiple discrete getter cartridges distributed across the chamber walls. Each cartridge operates independently but contributes to the overall pumping capacity, allowing the system to achieve high pumping speeds (exceeding 10^5 l/s for H2) while maintaining manageable complexity through modular deployment
Solution Approach 2:
The invention transitions from concentrated pumping locations to a distributed two-dimensional array of getter cartridges mounted on chamber walls. This spatial distribution across the surface area enables parallel gas sorption operations, dramatically increasing total pumping capacity without proportionally increasing control complexity
2Productivity
If getter cartridges are mounted in closed housings, then the structural integrity is improved, but the pumping capacity is limited by the housing configuration
Solution Approach 1:
The invention extracts the getter cartridges from traditional closed vacuum pump housings and mounts them directly on the chamber walls. This eliminates the intermediate housing structure and its associated volume limitations, allowing the getter material to be directly exposed to the vacuum environment for maximum pumping capacity while reducing overall system complexity
Solution Approach 2:
By mounting cartridges directly on wall surfaces rather than containing them in three-dimensional housing volumes, the system utilizes the two-dimensional wall area as the mounting platform. This dimensional transition enables higher cartridge density and greater total pumping capacity without the structural constraints of enclosed housings
3Productivity
If the density of getter cartridges is increased to achieve higher pumping speeds, then the pumping speed exceeds 10^5 l/s for H2, but the device complexity and manufacturing difficulty increase
Solution Approach 1:
The system achieves high pumping speeds (exceeding 10^5 l/s for H2) by segmenting the vacuum pumping function into numerous small, identical getter cartridges distributed across the chamber walls. Each cartridge is a simple, standardized unit that can be independently manufactured and installed, making the high-density configuration manufacturable despite the large number of components
Solution Approach 2:
The invention changes the deployment parameter from low-density concentrated mounting to high-density distributed mounting across wall surfaces. By optimizing the spatial distribution and density parameters of cartridge placement, the system achieves the required pumping speed threshold while maintaining ease of manufacture through standardized mounting patterns and simplified cartridge designs
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves pumping speeds exceeding 10^5 l/s for H2 and increased capacity for residual gases, effectively managing transient peak pressures and enhancing overall vacuum control in high-volume environments.
Implementation Method 1
getter cartridges having a linear support connected to said wall portion... enhanced gas sorption capabilities
Implementation Method 2
plurality of linear heaters wherein said wall portion has a surface area of at least 0,5 m2... plurality of linear heaters (20-5000/m²) mounted on a wall
Data Source
Figure 1~2
Figure 3
AI summary
Getter pumping system particularly useful for linear accelerators or more generally high-volume environments,wherein a plurality of getter cartridges (100, 100', 100",... 100n) having a linear support (110, 110', 110",... 110n) and a plurality of linear heaters (120, 120',... 120n) are connected in a high-density configuration to a wall (11) that has a surface area of at least 0,5 m2.