Gimbaled Scanning Mirror Array for High-Frequency Large-Angle Optical Scanning
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Solution Overview
Problem
Existing optical scanning systems face challenges in achieving high scan frequency and large scan range while maintaining mirror size, due to material limitations, which conflicts with the desire for increased sensitivity and mechanical stability.
Innovation Solution
The use of an array of multiple, adjacent micromirrors that oscillate in synchronization, behaving optically as a single larger mirror, with flexible coupling members to maintain phase synchronization and rotate about multiple axes, enhancing scan capabilities and sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of moving object
If a single large scanning mirror is used to achieve large scan range and high sensitivity, then the mirror size increases, but the mechanical stability and scan frequency deteriorate due to material limitations
Solution Approach 1:
The patent divides a single large mirror into multiple smaller micromirrors (e.g., 8x8 array) that can be independently actuated or synchronized to oscillate together. Each micromirror has reduced mass and moment of inertia, enabling higher scan frequencies while the array collectively provides the equivalent optical aperture of a large mirror, thus resolving the contradiction between mirror size and scan frequency
2Area of moving object
If a single large scanning mirror is used to achieve large scan range, then the mirror size increases, but the mechanical stability deteriorates
Solution Approach 1:
By segmenting the large mirror into multiple small micromirrors, each element has improved mechanical stability due to lower mass and better support structure. The distributed mass reduces mechanical stress and improves resonant frequency characteristics, while the array configuration maintains the required optical aperture for large scan range
3Speed
If multiple micromirrors are used to increase scan frequency, then the scan frequency increases, but the effective mirror size decreases
Solution Approach 1:
The patent combines multiple small micromirrors into a synchronized array where all elements oscillate in phase, creating an effective optical aperture equivalent to a single large mirror. The flexible coupling members ensure phase synchronization across the array, allowing the system to achieve high scan frequency while maintaining the effective mirror size needed for large scan range and sensitivity
4Speed
If multiple micromirrors are used to increase scan frequency, then the scan frequency increases, but the mechanical stability deteriorates
Solution Approach 1:
Segmenting the mirror system into multiple small micromirrors with individual support structures improves mechanical stability by reducing the mass and moment of inertia of each moving element. This segmentation enables higher scan frequencies while maintaining stability, as each micromirror can be more effectively supported and controlled than a single large mirror
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for high-frequency scanning over large angles, increasing the effective size of the scanning mirror while maintaining mechanical stability and sensitivity, overcoming the limitations of single mirror designs.
Implementation Method 1
An electromagnetic drive is coupled to drive the micromirrors to oscillate about the respective parallel axes
Data Source
AI summary
An optical scanning device includes a substrate, which is etched to define an array of two or more parallel micromirrors and a support surrounding the micromirrors. Respective spindles connect the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support. One or more flexible coupling members are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective axes.