Glass-to-Ceramic Bonding With Intermediate Glass for Thermal Stability
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Solution Overview
Problem
The challenge lies in achieving a thermally stable connection between glass and ceramic elements with different expansion coefficients, particularly in semiconductor exposure machines, where temperature fluctuations cause unevenness due to direct gluing or soldering, and materials like SiSiC ceramic cannot be welded directly to ultra-low expansion glass without forming graphite.
Innovation Solution
A method involving an intermediate glass material with a matching expansion coefficient to the ceramic, which is first attached to the ceramic via welding or soldering, and then the glass element is connected to this intermediate material using spot thermal methods like laser welding, ensuring a planar surface at room temperature without adhesives.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If direct gluing or soldering is used to bond glass element to support element, then bonding strength is improved, but surface flatness deteriorates due to thermal expansion mismatch during temperature fluctuations
Solution Approach 1:
An intermediate layer made of glass frit or glass paste is applied between the glass element and support element. This intermediate layer has thermal expansion properties that bridge the mismatch between the glass element and ceramic/metal support, maintaining surface flatness while providing strong bonding through vitrification upon heating.
Solution Approach 2:
The bonding process utilizes controlled heating to change the physical state of the intermediate glass material, transforming it from a paste/frit state to a vitrified state. This parameter change enables the intermediate layer to flow and conform to surfaces during bonding, then solidify to maintain precise surface flatness after cooling.
2Strength
If SiSiC ceramic is welded directly to ultra-low expansion glass, then bonding strength is improved, but harmful graphite formation occurs
Solution Approach 1:
The intermediate layer of glass frit or glass paste serves as a mediator between SiSiC ceramic and ultra-low expansion glass. This intermediate material is compatible with both substrates, enabling strong bonding through vitrification without causing graphite formation that would occur with direct welding of the ceramic to the glass element.
3Ease of operation
If adhesive is used to bond glass element to support element, then ease of assembly is improved, but thermal stability deteriorates due to adhesive softening during heating
Solution Approach 1:
The intermediate glass material undergoes a parameter change from paste/frit form (easy to apply) to vitrified form (thermally stable) through controlled heating. The heating process transforms the intermediate layer into a rigid, thermally stable bonding layer that maintains its properties during subsequent temperature fluctuations, eliminating adhesive softening issues.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for a strong, adhesive-free connection that minimizes displacement and surface unevenness during temperature changes, enabling the use of glass elements with ceramic or metal carriers, even in high-precision optical devices like EUV sensor modules.
Implementation Method 1
the intermediate glass material having a third coefficient of thermal expansion that is essentially the same as the second
Implementation Method 2
In this process, the glass element and the intermediate glass material are heated simultaneously using a laser
Data Source
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AI summary
The invention relates to a method (400) for making thermally stable connection between a glass element and a support element, the glass element having a first coefficient of expansion and the support element having a second coefficient of expansion differing from the first coefficient of expansion. The method (400) comprises a step (405) of attaching an intermediate glass material on the support element, the intermediate glass material having a third coefficient of expansion which is substantially the same as the second coefficient of expansion. The method (400) also comprises a step (410) of locally heating the intermediate glass material in order to connect the glass element to the support element by means of the intermediate glass material.