Glass Clad Microelectronic Substrate High Density Interconnects

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current microelectronic substrates face challenges in achieving high density, ultra-thinness, and hermeticity for reliable electrical communication between microelectronic devices and external components, while maintaining stress balance and compatibility with moisture-sensitive low-K, low-loss dielectric materials.

Innovation Solution

The development of microelectronic substrates with a trace routing structure disposed between opposing glass layers, comprising dielectric layers with conductive traces and through-glass contact structures, which allows for high-density interconnections and ultra-thinness, achieved through specific fabrication processes involving glass materials and surface treatments.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If conventional substrates are used to achieve high density interconnections, then interconnection density is improved, but substrate thickness cannot be reduced to ultra-thin levels while maintaining structural integrity

Engineering Contradiction:
Improveinterconnection densityVSAvoidsubstrate thickness
Core Design Contradiction:
Quantity of substanceVSLength of stationary object

Solution Approach 1:

The substrate employs a composite structure combining glass layers with dielectric materials containing low-K, low-loss properties. This composite approach enables ultra-thin profile (less than 0.010 inch) while maintaining mechanical integrity and supporting high-density interconnections through the glass-clad architecture.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The glass layers serve as thin film structures that provide both mechanical support and hermetic sealing. The glass-clad configuration allows the substrate to achieve ultra-thin dimensions while the glass layers maintain structural integrity and protect the internal interconnection structures.

Inventive Principle:
Principle #30Flexible shells and thin films

2Reliability

If hermetic sealing is implemented for moisture protection, then reliability is improved, but stress balance in the substrate structure deteriorates

Engineering Contradiction:
Improvemoisture protectionVSAvoidstress balance
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The multi-layer composite structure including glass layers and dielectric materials with specific stress properties creates a stress-balanced configuration. The glass-clad architecture with hermetic sealing provides moisture protection while the composite nature of the layers compensates for thermal expansion differences, maintaining stress balance.

Inventive Principle:
Principle #40Composite materials

3Reliability

If low-K, low-loss dielectric materials are used for signal integrity, then electrical performance is improved, but sensitivity to moisture and environmental factors increases

Engineering Contradiction:
Improvesignal integrityVSAvoidmoisture sensitivity
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The glass layers function as hermetic barriers that seal the low-K, low-loss dielectric materials from environmental moisture. The glass-clad structure provides protective encapsulation, allowing the use of moisture-sensitive dielectric materials while maintaining signal integrity through hermetic isolation.

Inventive Principle:
Principle #30Flexible shells and thin films

4Length of stationary object

If ultra-thin substrate profile is achieved, then device miniaturization is improved, but manufacturing complexity and precision requirements increase

Engineering Contradiction:
Improvesubstrate thicknessVSAvoidfabrication precision
Core Design Contradiction:
Length of stationary objectVSManufacturing precision

Solution Approach 1:

The manufacturing process utilizes parameter changes including temperature-controlled lamination and curing cycles to achieve precise bonding of ultra-thin glass layers. The glass-clad structure with controlled layer thicknesses and material properties enables ultra-thin profile (less than 0.010 inch) while managing fabrication precision through parameter optimization.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS9793201B2Glass clad microelectronic substrate
Publication Date: 2017.10.17 INTEL CORP
  • US9793201B2 patent drawing
  • US9793201B2 patent drawing
  • US9793201B2 patent drawing

AI summary

Embodiments of the present description relate to the field of fabricating microelectronic substrates. The microelectronic substrate may include a trace routing structure disposed between opposing glass layers. The trace routing structure may comprise one or more dielectric layers having conductive traces formed thereon and therethrough. Also disclosed are embodiments of a microelectronic package including a microelectronic device disposed proximate one glass layer of the microelectronic substrate and coupled with the microelectronic substrate by a plurality of interconnects.