Selective Glass Layer Printing for Ceramic Substrate Planarization

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Solution Overview

Problem

The roughness of ceramic substrates in electronic devices affects the reliability of passive elements like capacitors, leading to adhesion issues and potential short-circuits due to warpage during annealing, which existing methods like SOG coating fail to adequately address without increasing production costs.

Innovation Solution

A method involving selective formation of a glass layer on the ceramic substrate by printing, followed by baking, to create a flat surface for capacitor formation with improved adhesiveness, where the glass layer is only applied in areas where the capacitor will be formed, allowing for increased thickness without affecting the entire substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If SOG coating is used to planarize the ceramic substrate surface, then surface flatness is improved, but warpage of the whole substrate during baking is not resolved and production cost increases

Engineering Contradiction:
Improvesurface flatnessVSAvoidfabrication steps
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent applies glass layers selectively only in specific regions where capacitors will be formed, rather than coating the entire substrate surface. This localized approach planarizes the surface precisely where needed for capacitor fabrication while avoiding unnecessary processing of other areas, thereby improving surface flatness without adding excessive fabrication complexity

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The substrate surface is divided into multiple regions, with glass layers applied only to specific segments where capacitors are to be formed. This segmentation allows the surface to be planarized locally without requiring complete substrate coating, reducing the overall complexity of the fabrication process while achieving the required surface flatness

Inventive Principle:
Principle #1Segmentation

2Manufacturing precision

If the ceramic substrate surface is polished to remove warpage, then surface flatness is improved, but the number of fabrication steps increases and production cost increases

Engineering Contradiction:
Improvesurface flatnessVSAvoidproduction cost
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

Glass layers are applied to the ceramic substrate surface before capacitor formation, serving as a preliminary planarization step. This pre-coating approach creates a flat surface in advance, eliminating the need for subsequent polishing operations and reducing overall production costs while maintaining high surface flatness

Inventive Principle:
Principle #10Preliminary action

3Manufacturing precision

If a thick glass layer is applied to the entire substrate to improve flatness, then surface flatness is improved, but warpage during baking is not resolved and production cost increases

Engineering Contradiction:
Improvesurface flatnessVSAvoidfabrication process
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

Instead of applying a thick glass layer to the entire substrate, the patent applies glass layers selectively only in the regions where capacitors will be formed. This localized application provides sufficient planarization for capacitor fabrication without the need for complete substrate coating, thereby achieving surface flatness while avoiding excessive fabrication complexity

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the adhesiveness and flatness of the capacitor area, reducing the risk of short-circuits and warpage, thereby improving the reliability and reducing production costs by avoiding the need for extensive polishing.

Implementation Method 1

selectively forming a glass layer on a ceramic substrate by printing

Methodology Applied
Scientific EffectPrinting deposition: Deposition (physical)

Implementation Method 2

baking the glass layer

Methodology Applied
Scientific EffectBaking: Heating

Data Source

PatentUS8209829B2Method of fabricating the electronic device
Publication Date: 2012.07.03 TAIYO YUDEN KK
  • US8209829B2 patent drawing
  • US8209829B2 patent drawing
  • US8209829B2 patent drawing

AI summary

A method of fabricating an electronic device includes selectively forming a glass layer on a ceramic substrate by printing, baking the glass layer, and forming a capacitor on the glass layer, the capacitor including metal electrodes and a dielectric layer interposed between the metal electrodes.