Glass Microfluidic Device with Bonding Layer Etch Mask

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Solution Overview

Problem

Conventional microfluidic devices for bio-analysis, such as nucleic acid sequencing, face prolonged image collection times due to inadequate surface flatness and roughness of their channels, which affects imaging quality and efficiency.

Innovation Solution

The development of glass-based microfluidic devices with ultra-flat surfaces and parallel ceiling and floor surfaces, achieved through a three-layered glass substrate structure and a wet chemical etching process, where a bonding layer is used to create precise and smooth microfluidic channels with controlled surface flatness and roughness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of time

If conventional microfluidic devices are used for bio_analysis, then device simplicity is maintained, but image collection time is prolonged and imaging quality deteriorates due to inadequate surface flatness

Engineering Contradiction:
Improveimage collection timeVSAvoidsurface flatness
Core Design Contradiction:
Loss of timeVSManufacturing precision

Solution Approach 1:

The device is divided into multiple glass layers (first glass layer, second glass layer, third glass layer) that are fused together, with each layer serving specific functions. The flow channel is segmented into floor, ceiling, and sidewalls formed by different layers, allowing independent optimization of each surface for imaging quality.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different glass layers are assigned different properties: the first and third glass layers provide ultra-flat surfaces for imaging, while the second glass layer forms the flow channel sidewalls. The bonding layer is selectively applied only to specific regions to create the channel structure while preserving flat surfaces in imaging areas.

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If conventional manufacturing methods are used, then manufacturing simplicity is maintained, but surface roughness and flatness are inadequate for high-resolution imaging

Engineering Contradiction:
Improvesurface roughnessVSAvoidmanufacturing complexity
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The bonding layer is applied to the glass substrate before the flow channel is formed. This preliminary application allows the bonding layer to serve as an etch mask during channel formation, protecting the regions where flat surfaces are needed while allowing etching in channel regions, thereby achieving high precision surfaces through a systematic manufacturing approach.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The bonding layer acts as an intermediary material that enables precise control over the flow channel formation process. It serves multiple functions: defining channel boundaries, protecting surfaces from etching, and ultimately being removed to create the final channel structure with ultra-flat imaging surfaces.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Measurement precision

If the flow channel surfaces are made ultra-flat for imaging, then imaging quality improves, but device complexity increases due to multi-layer glass structure

Engineering Contradiction:
Improveimaging qualityVSAvoidglass layer structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The multi-layer glass structure serves multiple functions simultaneously: the first and third glass layers provide ultra-flat imaging surfaces, the second glass layer forms the flow channel sidewalls, and the bonding layer enables precise channel formation. This universal design achieves both imaging quality and structural integrity through a unified multi-layer architecture.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces image collection times, improves imaging quality, and enhances the efficiency of bio-analysis by minimizing the need for tip-tilt correction and allowing precise control over DNA surface density, leading to faster and more accurate biomolecule identification and quantification.

Implementation Method 1

The cover can be bonded to the glass substrate at a bonded volume comprising a bonding material diffused into each of the substrate and the cover

Methodology Applied
Scientific EffectDiffusion: Diffusion

Implementation Method 2

a wet chemical etching process, where a bonding layer is used to create precise and smooth microfluidic channels

Methodology Applied
Scientific EffectChemical etching: Ablation

Data Source

PatentUS11752500B2Microfluidic devices and methods for manufacturing microfluidic devices
Publication Date: 2023.09.12 CORNING INC
  • US11752500B2 patent drawing
  • US11752500B2 patent drawing
  • US11752500B2 patent drawing

AI summary

A method for manufacturing a microfluidic device (100) includes depositing a bonding layer (106) on a surface of a second glass layer (104a) of a glass substrate having a first glass layer (102) and the second glass layer (104a) fused to the first glass layer (102), such that a masked region of the surface is covered by the bonding layer, and an exposed region of the surface is uncovered by the bonding layer; removing a portion of the second glass layer corresponding to the exposed region of the surface to form a flow channel (112) in the glass substrate; and bonding a cover (108) to the glass substrate with the bonding layer (106).