Adjustable Glass Pallet Grid for Vertical Sputtering Uniformity
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing sputtering systems lack efficient pallets capable of accommodating large area glass substrates, particularly thicker and varying sizes and shapes, while maintaining thermal uniformity and preventing defects during vertical orientation processing.
Innovation Solution
Pallets with adjustable grid arrays and frames that hold glass substrates by at least two edges, maintaining a substantially vertical orientation, and configured to match thermal profiles with the substrates, using materials with similar thermal expansion coefficients, and optionally magnetic levitation for transport.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If conventional horizontal processing equipment is used for large area glass, then the processing aligns with the horizontal production method from tin float line, but the pallet cannot accommodate varying sizes and shapes of glass substrates effectively
Solution Approach 1:
The pallet is divided into a modular grid array structure with multiple adjustable support positions. The grid consists of intersecting support bars that can be independently positioned to accommodate different substrate dimensions and shapes, allowing flexible configuration without requiring a completely different pallet design for each substrate type.
Solution Approach 2:
The pallet incorporates adjustable and movable support elements within the grid array that can be repositioned during operation. This dynamic adjustment capability allows the same pallet structure to adapt to varying substrate sizes and shapes by changing the position and configuration of support bars, rather than requiring fixed rigid supports.
2Temperature
If glass substrates are held at multiple points on the back surface using rollers, then supporting large area glass is easily done, but thermal uniformity cannot be maintained during vertical orientation processing
Solution Approach 1:
The pallet provides different types of support at different locations on the substrate. Edges are held by clamps or grips that allow thermal expansion, while the center and other regions are supported by bars or rollers that maintain thermal uniformity. This localized differentiation of support characteristics addresses both thermal management and handling requirements.
Solution Approach 2:
The pallet design changes the support parameters from continuous roller contact to discrete edge holding points combined with distributed thermal mass elements. This parameter change allows the system to maintain vertical orientation while achieving thermal uniformity through the thermal mass of the pallet structure itself, rather than relying on continuous mechanical support points.
3Quantity of substance
If thicker heavy glass or multiple glass substrates are transported, then production capacity increases, but the pallet must maintain structural integrity and thermal profile under increased load
Solution Approach 1:
The pallet is constructed from materials with high thermal mass and appropriate mechanical strength properties. The combination of structural components provides both the strength needed to support thicker heavy glass or multiple substrates and the thermal mass needed to maintain thermal uniformity during processing, achieving both load-bearing and thermal management functions simultaneously.
4Productivity
If vertical orientation processing is implemented, then new pallet designs are needed to hold substrates by edges, but this increases device complexity compared to conventional horizontal systems
Solution Approach 1:
The pallet design integrates multiple functions into a single structure: edge holding clamps, thermal mass for temperature control, support for vertical orientation, and accommodation of varying substrate sizes. This multi-functionality reduces the need for separate mechanisms for each function, thereby limiting the increase in overall device complexity despite the advanced capabilities provided.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables flexible handling of varying substrate sizes and shapes, maintains thermal uniformity, reduces defects, and prevents backside contamination, enhancing the sputtering process efficiency.
Implementation Method 1
The pallet may be transported through a sputter system using mechanical means, and optionally magnetic levitation.
Implementation Method 2
pallets are configured to carry and/or absorb the heat load in the sputter apparatus so that their thermal profile approximates that of the glass substrate(s) which they carry
Implementation Method 3
using materials with similar thermal expansion coefficients, and optionally magnetic levitation for transport
Data Source
AI summary
Pallets for transporting one or more glass substrates in a substantially vertical orientation through a sputtering system. In some cases, a pallet comprising a frame with an aperture and an adjustable grid array within the aperture. The adjustable grid array is configurable to hold a plurality of glass substrates of different shapes and/or sizes. In one case, the adjustable grid array comprises a system of vertical and horizontal support bars, wherein the vertical support bars configured to both support the plurality of glass substrates at their vertical edges, wherein the horizontal support bars are configured to support the plurality of glass substrates at their horizontal edges, wherein the ends of the horizontal support bars are slideably engaged with the vertical support bars.