Glass-Precursor Laser Patterning for Fine Periodic Structures

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Solution Overview

Problem

Existing methods struggle to form fine periodic structures on transparent materials like glass, as they lack the ability to generate surface waves from laser light, and lithography processes are complex and costly for large targets with curvature.

Innovation Solution

Applying a glass precursor that absorbs light onto a substrate and irradiating it with a short pulse laser, followed by an optional oxidizing process to form and improve the coloration of the fine periodic structure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If lithography is used to form periodic structures on glass, then manufacturing precision can be achieved, but device complexity and cost increase significantly

Engineering Contradiction:
Improveperiodic structure formationVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The invention extracts and eliminates the complex lithography process steps (resist deposition, exposure, development) by using a direct laser irradiation method that forms periodic structures on glass surfaces without requiring these intermediate processing steps

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention replaces the mechanical and chemical lithography system with an optical field-based direct writing system, where laser light directly induces periodic structural changes in the glass surface through photomodification, eliminating the need for mechanical resist handling and chemical processing

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Area of stationary object

If lithography is used for large-area fabrication, then periodic structure coverage increases, but cost and apparatus complexity increase

Engineering Contradiction:
Improvefabrication areaVSAvoidapparatus cost
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The laser irradiation system serves multiple functions: it can process large areas, create periodic structures, and handle curved surfaces all with the same apparatus configuration, eliminating the need for specialized equipment for each function

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The invention uses a movable stage or beam scanning system that dynamically adjusts the laser irradiation position, enabling flexible processing of large areas and curved surfaces without requiring large, complex fixed apparatus

Inventive Principle:
Principle #15Dynamics

3Speed

If conventional laser irradiation is used on transparent materials, then processing speed is fast, but surface wave generation fails due to transparency

Engineering Contradiction:
Improveprocessing speedVSAvoidsurface wave generation
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The invention introduces a coating layer as an intermediary between the laser and the transparent glass surface. This coating absorbs laser energy and converts it to heat or mechanical effects that propagate to the glass, enabling surface wave generation and periodic structure formation on transparent materials

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention changes the optical parameters of the glass surface by applying a coating with different optical absorption properties, transforming the surface from laser-transparent to laser-absorbing, thereby enabling surface wave generation while maintaining fast processing speeds

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

A simple process forms a fine periodic structure on any substrate type, maintaining micro periodic nature, allowing large-area processing without curvature limitations and enhancing translucency and heat resistance.

Implementation Method 1

applying a glass precursor which absorbs light onto the substrate

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Implementation Method 2

irradiating a short pulse laser to the glass precursor

Methodology Applied
Scientific EffectLaser heating: Laser

Implementation Method 3

an oxidizing process can improve the coloration of a fine periodic structure

Methodology Applied
Scientific EffectOxidation: Oxidation

Data Source

PatentUS12428338B2Microfabrication method
Publication Date: 2025.09.30 DEXERIALS CORP
  • US12428338B2 patent drawing
  • US12428338B2 patent drawing
  • US12428338B2 patent drawing

AI summary

A microfabrication method is provided with which it is possible to easily form a fine periodic structure on a surface of any substrate. A glass precursor is applied to a substrate, and the glass precursor is irradiated with short-pulse laser light. By the irradiation with short-pulse laser light, the glass precursor is activated to undergo a thermal reaction, and a fine periodic structure can be easily formed on the surface. Furthermore, by oxidizing the substrate on which the fine periodic structure has been formed, the hue of the surface can be improved while maintaining the fine periodic structure.