Glass Chemical Liquid Storage for Low-Impurity Semiconductor Processing
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Solution Overview
Problem
Chemical liquids used in semiconductor manufacturing, particularly for wiring formation processes, suffer from impurity-related defects and shorts when stored in conventional containers, leading to reduced yield and quality issues.
Innovation Solution
A chemical liquid storage body is designed with specific metal components (Fe, Al, Cr, Ni) at controlled impurity levels, a glass container with controlled sodium and other alkali metal distributions, and optimized void volumes to minimize impurity elution and ionization, enhancing short and defect inhibition performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional containers are used to store chemical liquids, then storage is simple and cost-effective, but impurity elution occurs leading to defects and shorts in semiconductor wiring
Solution Approach 1:
The container applies local quality by treating only the liquid contact portion (inner wall surface) with specific coatings or surface modifications, rather than altering the entire container. This localized treatment reduces impurity elution at the critical interface between container and chemical liquid, improving short and defect inhibition performance while maintaining overall container simplicity and cost-effectiveness.
Solution Approach 2:
The container employs composite materials by combining different materials or layers in the liquid contact portion, such as applying specialized coatings on glass or plastic substrates. This composite structure provides both the mechanical properties of the base material and the impurity-reducing properties of the coating layer, resolving the contradiction between reliability improvement and device complexity.
2Duration of action of stationary object
If chemical liquids are stored for extended periods, then manufacturing workflow is enabled, but impurity content increases causing yield reduction
Solution Approach 1:
The container performs preliminary action by pre-treating its inner surface with impurity-reducing coatings or surface modifications before the chemical liquid is stored. This preliminary preparation prevents impurity elution during the entire storage period, enabling extended storage durations while maintaining chemical liquid purity and preventing yield reduction.
Solution Approach 2:
The container acts as an intermediary between the external environment and the chemical liquid, using its specialized liquid contact portion to block impurity transfer. This intermediary function maintains chemical liquid purity during extended storage, resolving the contradiction between storage duration and reliability.
3Reliability
If high-purity chemical liquids are used, then wiring quality is improved, but impurity elution from containers degrades the purity
Solution Approach 1:
The container converts the potentially harmful interaction between container material and chemical liquid into a beneficial effect by applying surface treatments or coatings that prevent impurity elution. The liquid contact portion is specifically designed to be non-contaminating, transforming the container from a source of impurities into a protective element that maintains high-purity chemical liquids and thereby improves wiring board quality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly reduces impurity elution, maintaining high-purity chemical liquids, thereby preventing defects and shorts in semiconductor wiring, ensuring improved manufacturing yield and quality.
Implementation Method 1
a content mass ratio A/B of content A of sodium atoms in the surface region with respect to a total mass of the surface region to content B of sodium atoms in the bulk region with respect to a total mass of the bulk region is higher than 0.10 and lower than 1.0 in at least a portion of the liquid contact portion
Data Source
AI summary
The chemical liquid storage includes a container and a chemical liquid, wherein the chemical liquid contains at least one of Fe, Al, Cr, and Ni, a content of the specific metal component in the chemical liquid with respect to a total mass of the chemical liquid is equal to or smaller than 100 mass ppt, at least a portion of a liquid contact portion of the container is formed of glass containing sodium atoms, and provided that B represents a content of sodium atoms in a bulk region with respect to a total mass of the bulk region, and A represents a content of sodium atoms in a surface region with respect to a total mass of the surface region, a content mass ratio of A to B represented by A/B is higher than 0.10 and less than 1.0 in at least a portion of the liquid contact portion.