Glass Substrate Inspection with Support Arm Optical Sensors
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Solution Overview
Problem
Existing glass substrate inspection apparatuses face challenges in accurately detecting defects and ensuring proper alignment due to interference from support portions and the risk of substrate damage during inspection, leading to inefficiencies and waste in the flat panel display manufacturing process.
Innovation Solution
An apparatus equipped with support arms featuring optical sensors that sense incident light to detect defects and ensure accurate alignment of the glass substrate, utilizing cameras for imaging and a control portion to determine the state of the substrate based on light characteristics, thereby facilitating precise inspection and alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If optical devices are used to inspect glass substrate defects, then inspection capability is improved, but interference from support portions prevents accurate detection of defects on supported areas
Solution Approach 1:
A light-emitting unit is introduced as an intermediary component mounted on the support portion. This unit emits light toward the glass substrate surface in the inspection area, enabling the optical sensor to detect defects even in regions where the support portion is present. The light-emitting unit acts as a mediator that overcomes the interference caused by the support structure.
Solution Approach 2:
The inspection system transitions from relying solely on top-down optical imaging to incorporating light emission from the support portion itself. By mounting light-emitting units on the support structure, the system creates a new dimension of illumination that enables detection in previously inaccessible areas, effectively changing the spatial relationship between light source, object, and sensor.
2Stability of the object's composition
If glass substrate is supported on a support portion during inspection, then substrate stability is improved, but defects on supported portions cannot be accurately detected
Solution Approach 1:
The light-emitting unit mounted on the support portion serves as an intermediary that enables defect detection in the inspection area without requiring removal of the support structure. The support portion maintains substrate stability while the integrated light-emitting unit compensates for the detection limitation it creates.
3Area of stationary object
If glass substrate is not accurately aligned on support portion, then inspection coverage is improved (full substrate can be inspected), but substrate damage occurs due to collision with apparatus
Solution Approach 1:
An alignment sensor is introduced to perform preliminary detection of the glass substrate's position and orientation before the main inspection process. This preliminary action ensures the substrate is correctly positioned on the support portion, preventing collision damage during subsequent handling and inspection operations.
Solution Approach 2:
The alignment sensor provides feedback information about the substrate's alignment status to the control system. This feedback mechanism enables real-time monitoring and adjustment of substrate position, ensuring accurate placement and preventing collision damage while maintaining full inspection coverage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables effective detection of defects on supported portions and accurate alignment of glass substrates, reducing the risk of damage and improving the quality control process by distinguishing between good-quality and inferior substrates, thus minimizing waste and optimizing manufacturing efficiency.
Implementation Method 1
at least one support arm including an optical sensor that senses incident light
Data Source
AI summary
An apparatus for inspecting a glass substrate is provided, which comprises at least one support arm including an optical sensor that senses incident light and supporting the glass substrate, and a control portion determining whether the glass substrate and the optical sensor overlap each other or a state of the glass substrate based on characteristics of the light sensed by the optical sensor.