Glass Substrate Mark Readability via 3D Dot Structure
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Solution Overview
Problem
Conventional glass substrates used in semiconductor manufacturing often have marks that are difficult to read reliably, which can lead to errors in identification and processing.
Innovation Solution
A manufacturing device for glass substrates is configured to form a mark composed of dots on the surface, using a laser oscillator and a mask with a transmission pattern and shielding part, where the shielding part extends beyond the contour of the transmission pattern, creating an indentation and projecting part to enhance contrast and readability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a mark is formed on the glass substrate surface by laser irradiation, then the mark can be created for identification, but the mark is difficult to read reliably
Solution Approach 1:
The patent applies local quality by creating a projecting part (protrusion) at a specific location on the mark that extends beyond the contour of the mark when viewed from the optical path direction. This localized structural modification enhances light reflection and shadow formation at that specific area, making the mark more readable without altering the entire mark structure
Solution Approach 2:
The patent transitions from a two-dimensional flat mark to a three-dimensional structure by adding a projecting part that extends in the thickness direction of the glass substrate. This dimensional change creates depth and shadow effects that significantly improve mark readability when viewed from the optical path direction
2Illumination intensity
If a simple flat mark is formed on the glass substrate, then the manufacturing process is simple, but the mark contrast and visibility are insufficient
Solution Approach 1:
The patent applies local quality by creating a projecting part (protrusion) at a specific location on the mark that extends beyond the contour of the mark when viewed from the optical path direction. This localized structural modification enhances light reflection and shadow formation at that specific area, making the mark more readable without altering the entire mark structure
Solution Approach 2:
The patent transitions from a two-dimensional flat mark to a three-dimensional structure by adding a projecting part that extends in the thickness direction of the glass substrate. This dimensional change creates depth and shadow effects that significantly improve mark readability when viewed from the optical path direction
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution allows for easy reading of the mark by increasing contrast and visibility, improving the reliability of mark identification and processing in semiconductor manufacturing.
Implementation Method 1
a laser oscillator configured to oscillate laser light that forms a dot on the glass substrate
Implementation Method 2
the mask includes a transmission pattern including a transmission part through which the laser light is transmitted and a shielding part that blocks the laser light
Data Source
AI summary
To provide a glass substrate having a surface on which a mark constituted of a plurality of dots is disposed. The dot includes an indentation part as a portion depressed from the surface, and a projecting part projecting from the indentation part in a thickness direction of the glass substrate. The projecting part extends at a position overlapping a contour of the dot or on an inner side than the contour.