Glass Waveguide Mirror Layout for Low-Defect Optical Coupling

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Solution Overview

Problem

Existing optical devices with waveguides and mirrors face challenges in manufacturing efficiency and interface defects, leading to suboptimal performance in guiding and reflecting optical signals.

Innovation Solution

A method involving laser engraving to form trenches in a glass plate, followed by hydrofluoric acid treatment, where a mirror is placed in one trench and a waveguide material with a different refractive index is used in another trench, both covered by an encapsulation layer, with the mirror inclined to minimize defects and enhance signal transmission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional manufacturing methods are used for waveguide and mirror interfaces, then manufacturing process is simpler, but interface defects increase and performance decreases

Engineering Contradiction:
Improveinterface qualityVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The waveguide core and cladding layers are formed in a single lithography and deposition step, merging what would traditionally be separate manufacturing processes. This integration reduces the number of interface formations and minimizes defects while maintaining manufacturing efficiency

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The encapsulation layer serves multiple functions simultaneously: it protects the waveguide structure, provides mechanical support, and acts as a lower cladding layer for optical confinement. This multi-functionality reduces the need for additional separate layers and processing steps

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Manufacturing precision

If precise laser engraving and acid treatment are used, then manufacturing precision improves, but manufacturing time increases

Engineering Contradiction:
Improvetrench precisionVSAvoidmanufacturing speed
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

Traditional mechanical drilling or cutting methods are replaced with laser engraving, which achieves superior precision without mechanical contact. The laser enables precise trench formation with smooth walls and accurate dimensions, eliminating mechanical tool wear and contact-induced deformations

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The use of hydrofluoric acid treatment changes the physical-chemical parameters of the trench surfaces, smoothing them and removing micro-defects. This chemical treatment optimizes the surface properties for subsequent material deposition and enhances optical performance without requiring additional mechanical polishing steps

Inventive Principle:
Principle #35Parameter changes

3Volume of moving object

If mirror is positioned close to waveguide end, then device size is reduced, but interface defects increase

Engineering Contradiction:
Improvedevice sizeVSAvoidinterface quality
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The mirror is positioned at an oblique angle (45 degrees) relative to the waveguide axis, changing the spatial arrangement from a conventional end-face configuration. This angular positioning allows the mirror to be placed closer to the waveguide end while maintaining adequate separation between the optical modes, reducing interface defects and improving coupling efficiency

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The encapsulation layer is selectively deposited with different thicknesses in different regions: thicker near the waveguide-mirror interface to provide protection and optical isolation, and thinner in other areas to minimize overall device size. This localized variation in layer properties optimizes both compactness and interface quality

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method improves the manufacturing efficiency and reduces defects at the waveguide/mirror interface, resulting in enhanced optical signal transmission and performance by precise machining and surface smoothing.

Implementation Method 1

The first trench and the second trench are formed by laser engraving

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

The glass plate is treated with hydrofluoric acid to smooth the surfaces of the trenches

Methodology Applied
Scientific EffectChemical etching:

Implementation Method 3

the first trench is filled with a material having a refractive index different from that of the glass to form a waveguide

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Implementation Method 4

The waveguide 14 is adapted to receive the light beam 12 and guide it towards the mirror 16... direct the light beam 12 in a direction substantially orthogonal to the main surface of the plate 13

Methodology Applied
Scientific EffectSpecular reflection: Reflection

Data Source

PatentUS11774664B2Method for manufacturing an optical device
Publication Date: 2023.10.03 STMICROELECTRONICS FRANCE
  • US11774664B2 patent drawing
  • US11774664B2 patent drawing
  • US11774664B2 patent drawing

AI summary

An embodiment optical device includes a glass plate, a first trench disposed in the glass plate, and a second trench disposed in the glass plate. The second trench crosses the first trench, and the first trench has an open end in a first wall of the second trench. The optical device includes a waveguide disposed inside the first trench, where the waveguide is formed of a material having a refractive index different from that of the glass plate, and a mirror on a second wall of the second trench opposite the first wall and waveguide. The optical device includes an encapsulation layer filling the second trench and covering all of an upper surface of the waveguide and having a refractive index that is different from the waveguide and the glass plate.