Global Shutter Pixel Trench Layout for Parasitic Light Blocking

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Solution Overview

Problem

Global shutter CMOS image sensors face issues with parasitic light sensitivity (PLS) due to uneven light blocking, particularly at image height ends, leading to image quality degradation from oblique incidence sensitivity and shading effects.

Innovation Solution

A solid-state image capturing apparatus with a semiconductor substrate featuring multiple pixels, each equipped with a photoelectric conversion unit, a charge accumulating unit, and a light-blocking section formed by trenches that correct the amount of light blocking according to image height, ensuring consistent light impact across the image height center and ends.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If a light-blocking film is used to block light from reaching the charge accumulating unit, then parasitic light sensitivity is reduced, but the cover effectiveness becomes uneven between image height center and image height ends

Engineering Contradiction:
Improveparasitic light sensitivityVSAvoiduniformity of light blocking cover
Core Design Contradiction:
Object-affected harmful factorsVSManufacturing precision

Solution Approach 1:

The patent applies asymmetry by making the light-blocking section asymmetric with respect to the charge accumulating unit. Specifically, the light-blocking section is positioned closer to the image height end than to the image height center, creating an asymmetric configuration that compensates for the oblique incidence of light at image height ends. This asymmetric positioning ensures that light-blocking performance is uniform across the entire image height, resolving the contradiction between reducing parasitic light sensitivity and achieving uniform cover effectiveness.

Inventive Principle:
Principle #4Asymmetry

2Reliability

If a global shutter structure with charge accumulating unit is implemented, then distortion-free capture of quickly-moving subjects is achieved, but openings narrow and optical properties deteriorate

Engineering Contradiction:
Improvedistortion-free capture capabilityVSAvoidoptical properties
Core Design Contradiction:
ReliabilityVSIllumination intensity

Solution Approach 1:

The patent resolves the contradiction by transitioning from a planar light-blocking approach to a three-dimensional trench structure. The light-blocking section is formed as a trench that extends in the depth direction (vertical dimension) within the semiconductor substrate, rather than merely as a surface layer. This dimensional change allows the trench to effectively block oblique incident light at image height ends without increasing the lateral footprint, thereby maintaining opening size while achieving uniform light blocking across the image height.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Object-affected harmful factors

If light-blocking films are added to block oblique incidence light, then parasitic light sensitivity at image height ends is reduced, but device complexity increases

Engineering Contradiction:
Improveoblique incidence sensitivityVSAvoidstructure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent applies merging by integrating the light-blocking function directly into the existing trench structure used for other purposes in the global shutter architecture. Rather than adding separate light-blocking films as independent components, the light-blocking section is merged with the trench structure that already exists in the semiconductor substrate. This integration achieves oblique incidence light blocking without increasing device complexity, as the light-blocking function is combined with the existing structural elements.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration improves image quality by aligning light impact with light-blocking films across the image height, reducing parasitic light sensitivity and oblique incidence effects, thus minimizing shading and coloring issues.

Implementation Method 1

each of the multiple pixels being provided with a photoelectric conversion unit that generates charge according to photoelectric conversion based on light incident on a light-receiving surface of the semiconductor substrate

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Implementation Method 2

a light-blocking section that is formed by a trench disposed within a layer between the light-receiving surface and the charge accumulating unit and blocks light that is incident via the light-receiving surface from being incident on the charge accumulating unit

Methodology Applied
Scientific EffectLight blocking: Absorption (EM radiation)

Data Source

PatentUS20240413180A1Solid-state image capturing apparatus
Publication Date: 2024.12.12 SONY SEMICON SOLUTIONS CORP
  • US20240413180A1 patent drawing
  • US20240413180A1 patent drawing
  • US20240413180A1 patent drawing

AI summary

Provided is a solid-state image capturing apparatus that can, between an image height center and positions where the image height becomes higher, align the impact of incident light with respect to light-blocking films. The solid-state image capturing apparatus is provided with a semiconductor substrate in which multiple pixels are disposed in a matrix. Each of the multiple pixels is provided with a photoelectric conversion unit that generates charge according to photoelectric conversion based on light incident on a light-receiving surface of the semiconductor substrate, a charge accumulating unit that accumulates the charge generated by the photoelectric conversion unit, a transfer transistor that transfers charge from the photoelectric conversion unit to the charge accumulating unit and has a vertical gate electrode that reaches the photoelectric conversion unit, and a light-blocking section that is formed by a trench disposed within a layer between the light-receiving surface and the charge accumulating unit and blocks light that is incident via the light-receiving surface from being incident on the charge accumulating unit. An amount of cover by the light-blocking section with respect to the charge accumulating unit is corrected according to an image height of a position where the pixel is disposed.