Goniometer Control for X-ray Diffraction Tilt

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Solution Overview

Problem

Existing X-ray diffractometers face limitations in controlling the tilt of a sample during ϕ axis rotation without a special axis configuration, leading to inaccurate incident angles and restricted measurement capabilities.

Innovation Solution

A control apparatus that uses the goniometer's axes to adjust the ω and χ values independently of the ϕ axis rotation, allowing for precise control of the sample's tilt and maintaining a constant incident angle by driving the goniometer's three or more rotation axes simultaneously, including the ϕ, χ, and ω axes, and utilizing the θs and θd axes for incident and receiving angle control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a special axis configuration (RxRy attachment) is provided to adjust sample inclination, then the incident angle control accuracy is improved, but the device complexity increases

Engineering Contradiction:
Improveincident angle control accuracyVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts the inclination adjustment function from a separate RxRy attachment and integrates it into the goniometer's existing ω and χ axes. By mathematically decoupling the inclination adjustment from the φ rotation, the system achieves the same measurement precision without requiring additional mechanical components, thus resolving the contradiction between precision and complexity.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The goniometer's ω and χ axes are made multi-functional by enabling them to perform both their traditional functions and the inclination adjustment function previously requiring a separate RxRy attachment. This universalization allows the existing structure to handle multiple measurement tasks without adding dedicated components for each function.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If the sample is rotated by φ axis during measurement, then the measurement coverage is improved, but the incident angle accuracy deteriorates due to precession

Engineering Contradiction:
Improvemeasurement coverageVSAvoidincident angle accuracy
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent implements a feedback mechanism where the control apparatus continuously monitors the φ rotation angle and dynamically adjusts the ω and χ values to compensate for precession effects. This real-time feedback ensures that the incident angle remains accurate throughout the φ rotation range, maintaining both measurement coverage and precision simultaneously.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system transitions from static inclination adjustment to dynamic adjustment during φ rotation. The ω and χ values are not fixed but are continuously modified based on the φ angle to maintain constant incident angle geometry. This dynamic approach allows the system to adapt to changing orientations while preserving measurement accuracy.

Inventive Principle:
Principle #15Dynamics

3Stability of the object's composition

If the crystal axis is matched to φ axis in advance to maintain constant incident angle, then the incident angle stability is improved, but the ease of operation deteriorates due to complex pre-adjustment

Engineering Contradiction:
Improveincident angle stabilityVSAvoidease of operation
Core Design Contradiction:
Stability of the object's compositionVSEase of operation

Solution Approach 1:

The patent performs preliminary calculation of the required ω and χ adjustment values based on the sample's crystallographic orientation and the desired φ rotation path. By pre-calculating the compensation values and storing them in lookup tables or as mathematical models, the system eliminates the need for manual pre-adjustment operations during actual measurement, thus improving ease of operation while maintaining angle stability.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The control apparatus automatically performs the inclination adjustment without requiring manual intervention to align crystal axes with the φ axis. The system self-regulates by computing and applying the necessary ω and χ corrections based on input parameters, making the process autonomous and easier to operate while ensuring stable incident angle geometry.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate control of the incident angle during ϕ axis rotation without the need for a special axis configuration, allowing for high-accuracy measurements in X-ray diffraction, including in-plane XRD, pole figure, and reciprocal space mapping, without the RxRy attachment.

Implementation Method 1

the in-plane rotation of a sample, that is, the rotation of the sample by a φ axis is necessary in each of the in-plane XRD measurement and the reciprocal space mapping

Methodology Applied
Scientific EffectRotation:

Implementation Method 2

adjustment amounts of a ω value and a χ value for correcting a deviation amount between a scattering vector and a normal line to a sample surface or a lattice plane normal with respect to a φ value that varies

Methodology Applied
Scientific EffectOrientation control:

Implementation Method 3

it is necessary to accurately control an incident angle of X-ray. When a sample thickness is thin, a diffraction signal intensity thereof becomes very weak

Methodology Applied
Scientific EffectX-ray diffraction: Diffraction

Implementation Method 4

irradiation of X-rays incident on a surface efficiently becomes necessary according to the in-plane XRD measurement

Methodology Applied
Scientific EffectX-ray irradiation: X-Ray

Data Source

PatentUS11788974B2Control apparatus, system, method, and program
Publication Date: 2023.10.17 RIGAKU CORP
  • US11788974B2 patent drawing
  • US11788974B2 patent drawing
  • US11788974B2 patent drawing

AI summary

There is provided a control apparatus 40 that controls a tilt of a sample, the control apparatus comprising an input section 41 that receives an input of inclination information representing inclination of the sample with respect to a ϕ axis; an adjustment amount determination section 43 that determines adjustment amounts of a ω value and a χ value for correcting a deviation amount between a scattering vector and a normal line to a sample surface or a lattice plane with respect to a ϕ value that varies, using the inclination information; and a drive instruction section 47 that drives a goniometer according to ϕ axis rotation of the sample, based on the determined adjustment amounts of the ω value and the χ value, during an X-ray diffraction measurement.