Graded Conductive Layer for pMTJ Switching Efficiency

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Solution Overview

Problem

The challenge in commercializing perpendicular magnetic tunnel junction (pMTJ) based memory devices lies in increasing switching efficiency and reducing electrical resistance, which is hindered by the degradation of switching efficiency due to materials used in the pMTJ stack, particularly the dielectric capping layers like MgO, leading to higher operating voltages and metastable states.

Innovation Solution

A graded composition storage layer capping scheme is introduced, where a conductive layer with a metallic dopant, such as tungsten, molybdenum, or tantalum, is used between the free magnet and the capping electrode, allowing for a gradual transition and reducing magnetic damping, thereby improving switching efficiency and reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a dielectric capping layer like MgO is used in the pMTJ stack, then the device structure is simplified and manufacturing is easier, but switching efficiency degrades and electrical resistance increases

Engineering Contradiction:
Improveease of manufactureVSAvoidswitching efficiency
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

A graded composition storage layer is introduced as an intermediate layer between the free magnet and the dielectric capping layer. This graded layer has a composition that transitions from magnetic material near the free magnet to non-magnetic material near the dielectric layer, serving as a mediator that preserves interfacial anisotropy while enabling the use of simple dielectric capping layers for manufacturing

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The storage layer is designed with spatially varying composition - the region adjacent to the free magnet maintains high magnetic content to preserve interfacial anisotropy, while the region adjacent to the dielectric capping layer has reduced magnetic content to ensure compatibility with the dielectric material. This local quality variation resolves the contradiction between manufacturing simplicity and switching efficiency

Inventive Principle:
Principle #3Local quality

2Device complexity

If the pMTJ stack uses conventional materials, then device fabrication is straightforward, but operating voltage increases and switching efficiency decreases

Engineering Contradiction:
Improvedevice complexityVSAvoidoperating voltage
Core Design Contradiction:
Device complexityVSUse of energy by moving object

Solution Approach 1:

The storage layer composition parameter is changed from uniform to graded, creating a gradual transition in magnetic properties. This parameter change enables the system to maintain low operating voltage by preserving interfacial anisotropy in the critical region while still allowing conventional fabrication processes to be used

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If a uniform composition storage layer is used, then fabrication process is simpler, but magnetic damping increases and switching efficiency decreases

Engineering Contradiction:
Improveease of manufactureVSAvoidmagnetic damping
Core Design Contradiction:
Ease of manufactureVSLoss of energy

Solution Approach 1:

The storage layer is designed with non-uniform composition - the region adjacent to the free magnet maintains high magnetic content to minimize magnetic damping and preserve interfacial anisotropy, while the region adjacent to the dielectric capping layer has reduced magnetic content. This local quality variation reduces energy loss while maintaining manufacturability

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The graded composition storage layer acts as an intermediary that gradually transitions from magnetic to non-magnetic properties, reducing abrupt interfaces that cause magnetic damping while maintaining the necessary magnetic properties near the free magnet for efficient switching

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances switching efficiency and reliability by reducing magnetic damping and preserving interfacial anisotropy, leading to faster switching speeds and lower write energy, making pMTJ devices more viable for practical applications.

Implementation Method 1

reducing magnetic damping

Methodology Applied
Scientific EffectMagnetic damping: Damping

Implementation Method 2

preserving interfacial anisotropy

Methodology Applied
Scientific EffectInterfacial anisotropy: Anisotropy

Data Source

PatentUS11063088B2Magnetic memory devices and methods of fabrication
Publication Date: 2021.07.13 INTEL CORP
  • US11063088B2 patent drawing
  • US11063088B2 patent drawing
  • US11063088B2 patent drawing

AI summary

A memory device includes a first electrode, a second electrode and a magnetic tunnel junction (MTJ) between the first electrode and the second electrode. The MTJ includes a fixed magnet, a free magnet and a tunnel barrier between the fixed magnet and the free magnet. The MTJ further includes a conductive layer between the free magnet and the second electrode, the conductive layer having a metallic dopant, where the metallic dopant has a concentration that increase with distance from an interface between the free magnet and the conductive layer. A capping layer is between the conductive layer and the second electrode.