Graded CTE Multi-Layer Substrate Warpage Control

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Solution Overview

Problem

Thermal mismatch between components in microelectronic systems due to mismatched coefficients of thermal expansion (CTE) leads to thermo-mechanical issues such as warpage and stress, which existing semiconductor packaging technologies fail to adequately address.

Innovation Solution

A multi-layer molded semiconductor substrate with a graded CTE across its layers, where the bottom layer has a higher CTE and the top layer has a lower CTE, optimized to distribute warpage and stress, using mold compounds with varying filler content and types to achieve desired CTE values, and incorporating conductive materials for electrical signal transmission and thermal dissipation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a single-layer substrate with uniform CTE is used, then the manufacturing process is simple, but thermal mismatch causes warpage and stress between components

Engineering Contradiction:
Improvethermal performanceVSAvoidsubstrate structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The substrate is divided into multiple layers, each with different CTE values, to create a graded CTE profile that reduces thermal mismatch stress between components while maintaining structural integrity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the substrate (different layers) are assigned different CTE properties to match the thermal expansion characteristics of adjacent components at each interface, optimizing thermal performance locally throughout the structure

Inventive Principle:
Principle #3Local quality

2Reliability

If mold compound with high filler content is used to reduce CTE, then thermal mismatch is reduced, but manufacturing complexity and cost increase

Engineering Contradiction:
ImproveCTE matchingVSAvoidmanufacturing process
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The filler distribution is segmented across multiple layers, with each layer containing specific filler types and concentrations optimized for its required CTE value, allowing precise thermal property control without overwhelming manufacturing complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The CTE parameters of the mold compound are systematically varied across layers by adjusting filler content and composition, creating a graded transition that optimizes thermal matching while maintaining manufacturability

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The graded CTE multi-layer substrate effectively reduces thermo-mechanical issues by distributing warpage and stress across the system, improving thermal performance and structural integrity while minimizing thermal mismatch between coupled components.

Implementation Method 1

mismatch in coefficient of thermal expansion (CTE) between interacting components, such as a die and a substrate

Methodology Applied
Scientific EffectCoefficient of thermal expansion (CTE): Thermal Expansion

Implementation Method 2

conductive material configured to transmit electrical signals through or among different layers of the multi-layer molded substrate

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 3

conductive materials for electrical signal transmission and thermal dissipation

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentEP3394880B1Multi-layer molded substrate with graded cte
Publication Date: 2022.08.17 INTEL CORP
  • EP3394880B1 patent drawingFigure 1~4
  • EP3394880B1 patent drawingFigure 5~9
  • EP3394880B1 patent drawingFigure 10~14

AI summary

This document discusses, among other things, a multi-layer molded substrate having layers with a graded coefficients of thermal expansions (CTEs) to optimize thermal performance of the multi-layer molded substrate with first and second structures attached to top and bottom surfaces of the multi-layer molded substrate, respectively.