Gradient-Filler Adhesive Film for Copper Ion Barrier Packaging

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Solution Overview

Problem

Existing film-like adhesives are insufficient in preventing the movement of heavy metal ions, particularly copper ions, which can cause operation defects in semiconductor packages due to diffusion into silicon crystals.

Innovation Solution

A film-like adhesive with a resin composition containing a filler, featuring a region near the surface with a decreasing filler content, providing a barrier function to prevent heavy metal ion movement, and a dicing/die-bonding integrated film incorporating this adhesive for semiconductor manufacturing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a film-like adhesive with uniform filler distribution is used, then mechanical strength is maintained, but heavy metal ion diffusion cannot be effectively prevented

Engineering Contradiction:
Improveprevention of heavy metal ion diffusionVSAvoidadhesive structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The adhesive film employs a gradient filler distribution where the filler content rate decreases from the second surface toward the first surface. This creates a resin-rich region near the first surface that acts as a barrier to heavy metal ion diffusion, while maintaining adequate filler content in other regions to preserve mechanical strength. The local variation in filler concentration resolves the contradiction between ion barrier performance and structural complexity.

Inventive Principle:
Principle #3Local quality

2Reliability

If gettering processing is performed on ultrathin wafers, then heavy metal ion trapping is improved, but the wafer becomes difficult to handle and may develop cracks

Engineering Contradiction:
Improveheavy metal ion trappingVSAvoidwafer mechanical strength
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The adhesive film serves as an intermediary barrier between the ultrathin wafer and the environment containing heavy metal ions. Instead of performing gettering processing directly on the fragile wafer, the adhesive film's resin-rich region intercepts and prevents heavy metal ion diffusion, thereby protecting the wafer from ion contamination without compromising its mechanical integrity or requiring additional processing steps that could cause cracks.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Strength

If filler content is increased throughout the adhesive film, then mechanical strength is improved, but barrier function against heavy metal ions is reduced

Engineering Contradiction:
Improveadhesive mechanical strengthVSAvoidheavy metal ion barrier function
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The adhesive film employs a gradient filler distribution where the filler content rate decreases from the second surface toward the first surface. This creates a resin-rich region near the first surface that acts as a barrier to heavy metal ion diffusion, while maintaining adequate filler content in other regions to preserve mechanical strength. The local variation in filler concentration resolves the contradiction between ion barrier performance and structural complexity.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The adhesive effectively prevents heavy metal ion diffusion, enhancing the reliability of semiconductor devices by reducing defects and maintaining mechanical strength.

Implementation Method 1

the film-like adhesive has a region in the vicinity of the first surface, the region in which the content rate of the filler decreases from the second surface side toward the first surface side... the film-like adhesive having a barrier function of preventing movement of heavy metal ions

Methodology Applied
Scientific EffectDiffusion barrier: Diffusion Barrier

Data Source

PatentUS20250293192A1Film-form adhesive, adhesive film, integrated dicing/die bonding film, and method for manufacturing semiconductor device
Publication Date: 2025.09.18 RESONAC CORP
  • US20250293192A1 patent drawing
  • US20250293192A1 patent drawing
  • US20250293192A1 patent drawing

AI summary

A film-like adhesive containing a thermosetting resin component; and a filler, in which the film-like adhesive has a single layer structure including a first surface and a second surface, and has a region in a vicinity of the first surface, the region in which a content rate of the filler decreases in a direction from the second surface toward the first surface.