Gradient Dosage Illumination for Nanoimprint Edge Extrusion Control
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Solution Overview
Problem
Nanoimprint lithography systems face challenges in preventing extrusions on sidewalls during the imprinting process, which can lead to non-fill defects and reduced production yields.
Innovation Solution
The implementation of a gelling radiation distribution pattern with a gradient dosage, varying from minimum to peak intensity across the boundary edges, is used to control the flow of formable material, preventing extrusions by partially curing the material as it approaches the edges, thereby reducing viscosity and flow rate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If uniform radiation dosage is applied across the imprint field, then the curing process is simplified, but extrusions form on the sidewalls causing non-fill defects
Solution Approach 1:
The patent applies a non-uniform radiation dosage distribution where the intensity varies spatially across the imprint field. Specifically, the radiation intensity is highest at the center of each boundary edge and lowest at the corners, creating local quality variations that control material flow and prevent extrusions at critical locations while maintaining proper filling.
Solution Approach 2:
The patent implements a gelling radiation distribution pattern that partially cures the formable material before complete imprinting is finalized. This preliminary action increases material viscosity in specific regions (boundary edges) to prevent extrusions during the remaining imprinting process, addressing the problem proactively rather than reactively.
2Manufacturing precision
If corners are illuminated with high dosage to ensure filling, then filling completeness improves, but extrusions increase on the edges
Solution Approach 1:
The patent implements differential radiation dosing where corners receive minimum dosage and boundary edge centers receive peak dosage. This local quality differentiation ensures that corners are filled adequately without receiving excessive radiation that would cause material to migrate toward edges and form extrusions. Each location receives the specific dosage it needs for optimal results.
Solution Approach 2:
The patent applies radiation preferentially to boundary edge centers before material can migrate to corners, creating a preliminary barrier that prevents extrusions. The gelling pattern acts as a preventive measure that counteracts the natural tendency of material to flow toward corners and extrude at edges, addressing the problem in advance rather than attempting to correct it afterward.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively diminishes extrusions and reduces non-fill defects by ensuring uniform filling of the pattern region, improving the quality of imprints and reducing defects.
Implementation Method 1
illuminating the formable material with a gelling radiation distribution pattern... partially curing the material as it approaches the edges
Data Source
AI summary
Systems and methods for imprinting formable material on a substrate with a template. Illuminate the formable material with a gelling radiation distribution pattern. The gelling radiation distribution pattern has a gelling dosage that that varies from a minimum gelling dosage at each of a plurality of corners of a boundary edge to a peak gelling dosage at a center of each of the boundary edges.