Graphene Base Transistor Reduces Collector Capacitance

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Solution Overview

Problem

Conventional semiconductor transistors face limitations in achieving high frequency and temperature operation due to high base resistance and collector-base capacitance, which restricts their maximum frequency of oscillation and thermal management.

Innovation Solution

A graphene base transistor with a reduced collector area is developed, utilizing graphene sheets as the base material layer, integrated with low-K dielectric materials and dielectric spacers to minimize capacitance and enhance thermal conductivity, along with epitaxial growth and selective doping to optimize heterojunctions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional semiconductor materials are used for the base region, then the transistor structure is simple to manufacture, but the base resistance is high which limits maximum frequency of oscillation

Engineering Contradiction:
Improvemaximum frequency of oscillationVSAvoidbase material fabrication
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent changes the fundamental material parameter of the base region from conventional semiconductors to graphene, which has inherently lower resistance and higher carrier mobility. This material substitution directly reduces base resistance and enables higher maximum frequency of oscillation, though it requires advanced fabrication techniques for graphene integration

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs a composite structure combining graphene base material with heterojunction semiconductor layers (such as GaN/AlGaN). This composite approach leverages the low resistance of graphene while maintaining compatibility with semiconductor fabrication processes, achieving both high frequency performance and manufacturability

Inventive Principle:
Principle #40Composite materials

2Reliability

If the collector area is reduced to lower capacitance, then the maximum frequency of oscillation increases, but the collector current and power handling capability decrease

Engineering Contradiction:
Improvemaximum frequency of oscillationVSAvoidpower handling capability
Core Design Contradiction:
ReliabilityVSPower

Solution Approach 1:

The patent applies local quality by creating a non-uniform collector structure where the collector area under the base is reduced to minimize capacitance, while the emitter area is enlarged to maintain high current injection capability. This localized optimization allows the collector to have low capacitance for high frequency operation while the emitter provides sufficient current for power handling

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent transitions from a planar transistor design to a three-dimensional structure with elevated emitter and collector regions. By raising the emitter and collector above the substrate plane and reducing the lateral collector area, the design achieves low capacitance in the critical base-collector region while maintaining vertical current flow paths that preserve power handling capability

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If the base region area is reduced to lower capacitance, then the maximum frequency of oscillation increases, but the base current and current gain decrease

Engineering Contradiction:
Improvemaximum frequency of oscillationVSAvoidcurrent gain
Core Design Contradiction:
ReliabilityVSPower

Solution Approach 1:

The patent changes the base material to graphene, which has extremely high carrier mobility and low resistance. This material parameter change allows the base region to be made very thin and small in area, reducing capacitance for high frequency operation, while the superior electrical properties of graphene compensate for the reduced area by maintaining low base current and high current gain

Inventive Principle:
Principle #35Parameter changes

4Temperature

If conventional materials are used for thermal management, then the device structure is simple, but the thermal conductivity is insufficient for high temperature operation

Engineering Contradiction:
Improvehigh temperature operation capabilityVSAvoidthermal management structure
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent employs composite materials with high thermal conductivity, such as diamond or cubic boron nitride, in the thermal management structure. These advanced materials provide superior heat dissipation capabilities enabling high temperature operation, though they add complexity to the device structure and require specialized fabrication processes

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design achieves low base resistance, high maximum frequency of oscillation, and high temperature operation by reducing transit time and energy loss, while improving thermal management and carrier velocity, enabling high power and frequency performance.

Implementation Method 1

a base region (second region) with the base region consisting of one or more sheets of graphene known as the base graphene material layer region that is intermediate the first and third regions and forms electrical interfaces therewith

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 2

integrated with low-K dielectric materials and dielectric spacers to minimize capacitance

Methodology Applied
Scientific EffectCapacitance reduction: Capacitance

Implementation Method 3

along with epitaxial growth and selective doping to optimize heterojunctions

Methodology Applied
Scientific EffectEpitaxy: Epitaxy

Implementation Method 4

along with epitaxial growth and selective doping to optimize heterojunctions

Methodology Applied
Scientific EffectDoping: Dopants

Data Source

PatentUS10158009B2Method of making a graphene base transistor with reduced collector area
Publication Date: 2018.12.18 THE GOVERNMENT OF THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY DEPARTMENT OF HEALTH & HUMAN SERVICES
  • US10158009B2 patent drawing
  • US10158009B2 patent drawing
  • US10158009B2 patent drawing

AI summary

A method of making a graphene base transistor with reduced collector area comprising forming an electron injection region, forming an electron collection region, and forming a base region wherein the base region comprises one or more sheets of graphene and wherein the base region is intermediate the electron injection region and the electron collection region and forms electrical interfaces therewith.